半 导 体 词 汇 缩 写 表A/DanalogtodigitalAAatomicabsorptionAASatomicabsorptionspectroscopyABCactivity-basedcostingABMactivity-basedmanagementACalternatingcurrent;activatedcarbonACFanisotropicconductivefilmACIafter-cleaninspectionACPanisotropicconductivepasteACTalternativecontroltechniques;actualcycletimeADCanalog-to-digitalconverterADEadvanceddevelopmentenvironmentADIafter-developinspectionADTapplieddiagnostictechniqueADTSEMApply/DevelopTrackSpecificEquipmentModelAEatomicemission;acousticemission;absoluteellipsometryAECadvancedequipmentcontrollerAECSAdvancedEquipmentControlSystem;AutomatedEquipmentControlSystemAEIafter-etchinspection;automatedequipmentinterfaceAEManalyticalelectronmicroscopyAESAugeremission/electronspectroscopyAFMatomicforcemicroscopyAFPabrasive-freepolishAgsilverA-GEMTFAdvancedGEMTaskForceAGVautomatedguidedvehicleAHFanhydroushydrogenfluorideAHUairhandlingunitAIRautomatedimageretrievalAlaluminumALDatomiclayerdepositionALEatomiclayerepitaxy;applicationlogicelementALSadvancedlightsource;advancedlow-powerSchottkyAMCairbornemolecularcontaminationAMHSautomatedmaterialhandlingsystemAMTadvancedmanufacturingtechnologyAMUatomicmassunitANNartificialneuralnetworkANOVAanalysisofvarianceAOVair-operatedvalveAPadhesionpromoterAPAadvancedperformancealgorithmAPCadvancedprocesscontrolAPCDadd-onpollutioncontroldeviceAPCFIAdvancedProcessControlFrameworkInitiativeAPCVDatmosphericpressurechemicalvapordepositionAPECadvancedprocessequipmentcontrolAPIapplicationprogramminginterface;atmosphericpressureionizationAPMatmosphericpassivationmodule;acousticplatemodeAPRDLAdvancedProductsResearchandDevelopmentLaboratoryaPSMattenuatingphase-shiftmaskAQIACCESSqueryinterfaceAQLacceptablequalitylevelArargonARaspectratioARAMSAutomatedReliabilityARCantireflectivecoatingARDEaspectratio-dependentetchingARPAAdvancedResearchProjectsAgency(seeDARPA)ARSangle-resolvedscatteringAsarsenicAS/RSautomatedstorageandretrievalsystemASAPAdvancedStepperApplicationProgramASICapplication-specificintegratedcircuitASOautomaticshutoffASPadvancedstripandpassivation;advancedstripprocessorASRautomatedsendreceiveATDFAdvancedToolDevelopmentFacilityATEautomatictestequipmentATGautomatictestgenerationATLASabbreviatedtestlanguageforallsystemsatmatmosphereATPadvancedtechnologyprogram;adenosinetriphosphate;acceptanceandtoolperformanceATRattenuatedtotalreflectanceAttattenuatedAugoldAVPadvancedverticalprocessorAVSadvancedvisualizationsystemAWEasymptoticwaveformevaluationAWISPMabovewaferinsituparticlemonitoringAWSadvancedwetstationBbillion;boronBabariumBARCbottomantireflectivecoatingBASEBostonAreaSemiconductorEducation(Council)BAWbulkacousticwaveBCbiascontrastBDEVbehavior-leveldeviationBDSBrownianDynamicsSimulationBeberylliumBEOLbackendoflineBESOIbondedandetchbacksilicononinsulatorBFbrightfieldBFGSBroyden-Fletcher-Goldfarb-ShannooptimizationalgorithmBFLbufferedfield-effecttransistorlogicBGAballgridarrayBHTBrinellhardnesstestBibismuthBiCMOSbipolarcomplementarymetal-oxidesemiconductorBIFETbipolarfield-effecttransistorBIMbinaryintensitymaskBiMOSbipolarmetal-oxidesemiconductorBISTbuilt-inself-testBITbulkiontemperatureBITEbuilt-intestequipmentBMCbubblememorycontrollerBMDbulkmicrodefectBOEbufferedoxideetchantBORbottomofrangeBOSSBookofSEMIStandards;binaryobjectstoragesystemBOXburiedoxideBPRbeamprofilereflectometry;businessprocessreengineeringBPSGboronphosphosilicateglassBPTEOSBPSGfromaTEOSsourceBrbromineBSEbackscatteredelectrondetectionBTABbumpedtapeautomatedbondingBVbreakdownvoltageCcarbonCacalciumCACIMarchitectureCAACIMapplicationsarchitectureCABCompetitiveAnalysisBenchmarkingCADcomputer-aideddesignCADTcontrolapplicationdevelopmenttoolCAEcomputer-aidedengineeringCAIcomputer-assistedinstructionCAMcomputer-aidedmanufacturingCAPScomputer-assistedproblemsolvingCARchemicallyamplifiedresistCARRIComputerizedAssessmentofRelativeRiskImpactsCASEcomputer-aidedsoftwareengineering;computer-aidedsystemsengineeringCATcomputer-aidedtestingCAWConstructionAnalysisWorkgroupCAWCcryogenicaerosolwafercleaningCBGAceramicballgridarrayCBSchemicalbottlestorageareaCBTcomputer-basedtrainingCCchipcarrier;clustercontrollerCCCceramicchipcarrierCCDcharge-coupleddeviceCCSLcompatiblecurrent-sinkinglogicCCWcounterclockwiseCdcadmiumCDcriticaldimensionCD/OLcriticaldimensionoverlayCDAcleandryairCDEchemicaldownstreametchCDEMCustomerDeliveryEnterpriseModelCDIcollector-diffusi。