全自动晶片检测器 型号：P-12XL 错误/辅助代码列表 TOKYO ELECTRON LIMITED目录1． 错误1-11.1阶段错误----------------------------------------------------------------------1 – 1 1.1.1Motor错误（所有轴）代码E0001------------------------------------1-1 1.1.2X轴电机错误代码E0010---------------------------------------------1-2 1.1.3Y轴电机错误代码E0030---------------------------------------------1-31.1.4Z轴电机错误代码E0050---------------------------------------------1-41.1.5θ轴电机错误代码E0070--------------------------------------------1-51.1.6Sensor错误代码E0100-----------------------------------------------1-61.1.7Image识别设备错误代码E0200------------------------------------1-81.1.8Other错误代码E0600--------------------------------------------------1-91.1.9Marker错误代码E0700-----------------------------------------------1-121.1.10ASU相机错误代码E0730-------------------------------------------1-131.1.11Timer错误代码E0800----------------------------------------------1-131.1.12Alignment错误代码E0850-----------------------------------------1-141.1.13System错误代码E0900-----------------------------------------1-151.2加载程序错误。
1-18 1.2.1Undefined装载机错误代码E2001-------------------------------1-181.2.2Upper臂错误代码E2010---------------------------------------------1-181.2.3Lower臂错误代码E2029----------------------------------------------1-191.2.4Loaderθ错误代码E2037---------------------------------------------1-201.2.5Subchuckθ错误代码E2049-----------------------------------------1-221.2.6Loaderž错误代码E2059----------------------------------------------1-231.2.7Slide错误代码E2082--------------------------------------------------1-261.2.8Vacuum错误代码E2110----------------------------------------------1-271.2.9Subchuckž错误代码E2130-------------------------------------------1-281.2.10Loaderž错误代码E2140--------------------------------------------1-291.2.11Wafer表错误代码E2170 --------------------------------------------1-311.2.12Buffer表错误代码E2180 ------------------------------------------- 1-321.2.13Prealign错误代码E2203----------------------------------------------1-321.2.14Slide传感器错误代码E2210 ----------------------------------------------1-331.2.15Arm错误代码E2300 -------------------------------------------------------. 1-33 1.2.16Cassette插槽错误代码E2352--------------------------------------------1-34 1.2.17Position检查错误代码E2360 -------------------------------------------- 1-341.2.18Motor错误代码E2370 ------------------------------------------------------ 1-341.2.19Loader系统错误代码E2380 ----------------------------------------------- 1-351.2.20Prealignment错误代码E2401 ----------------------------------------------1-361.2.21Common错误代码E2550 --------------------------------------------- 1-371.2.22No晶圆在磁带插槽错误代码E2801 --------------------------------1-401.2.23A晶圆在磁带插槽错误代码E2901--------------------------------. 1-431.2.24No磁带错误代码E2950 -----------------------------------------------1-461.2.25Cassette钳位错误代码E2955 -----------------------------------------1-471.2.26Flat传感器错误代码E2959 ---------------------------------------------1-471.2.27Protruding错误代码E2970 ------------------------------------------- 1-481.2.28Mapping错误代码E3001 ---------------------------------------------------1-491.2.29Wafer地图错误代码E3250 ------------------------------------------------1-561.2.30Cassette数据错误代码E3501------------------------------------------ 1-631.2.31FOUP开瓶器错误代码E6150 ---------------------------------------------1-761.2.32FOUP开瓶器开瓶器错误代码E6165 -----------------------------------1-77 1.2.33FOUP开瓶器负载端口错误代码E6180 ---------------------------------1-78 1.2.34FOUP开瓶器纸盒错误代码E6190 ---------------------------------------1-79 1.2.35Loaderž错误代码E6200 ---------------------------------------------------- 1-80 1.2.36Mapping臂错误代码E6220 -----------------------------------------------1-82 1.2.37Drive电磁错误代码E6240 ----------------------------------------------- 1-83 1.2.38Communication错误代码E6260--------------------------------------- 1-831.3Application错误-------------------------------------------------------- 1-85 1.3.1Optional设备错误代码E4051-----------------------------------------------1-85 1.3.2Hot查错误代码E4201-------------------------------------------------------.1-88 1.3.3SACC错误代码E4350----------------------------------------------------------1-91 1.3.4Data处理错误代码E5501--------------------------------------------------1-982。
协助2-1 2.1Stage协助-------------------------------------------------------------------2-1 2.1.1Stage辅助代码A0001--------------------------------------------------------2-12.2Loader协助----------------------------------------------------------------2-9 2.2.1Undefined装载机辅助代码A2001 --------------------------------2-92.2.2Upper手臂辅助代码A2010 ----------------------------------------------2-92.2.3Lower手臂辅助代码A2029 ---------------------------------------2-102.3.4Loaderθ辅助代码A2037 ----------------。