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1、摘 要电阻率是电子材料的重要参考性能数，薄膜电阻率的测量备受关注。采用传统四探针高电阻率测量方法测量薄膜电阻率，需要加入较多的修正才能得到精确的结果。因此，研究薄膜电阻率的测量系统原理、软硬件集成方法等具有很重要的意义和应用价值。 在综合比较各种电阻率测量方法的基础上，本设计采用双电测组合法测量薄膜电阻率。首先，系统研究双电测组合法薄膜电阻率测量原理，跟据测量要求改进电阻率的计算方法，极大的简化相关修正，提高测量结果的可靠性和精确度。其次，基于单片机的Rymaszewski四探针双电测组合法设计了薄膜电阻率自动化测量系统。在8051单片机的控制下，利用基于CD4052芯片的接口电路实现电流探针
2、，电压探针的自动切换，并通过单片机控制实现两次电压测量；同时根据两次测量结果编程完成范德堡修正因子的计算，最终实现薄膜电阻率自动测量和显示，建立基于8051单片机的双电测四探针薄膜电阻率测量系统。实验结果表明，所设计的自动测量系统不仅可以满足多种薄膜电阻率测量要求，而且提高了测量精度和自动化程度，同时精简了薄膜电阻率测量过程。关键词：四探针双电测组合法; 范德堡修正因子;CD4052; 薄膜电阻率2AbstractAttention is mainly paid to the measurement of resistivity-an important property of thin fi
3、lm. Owing to apply traditional four-probe method on film sample resistivity measurement, complex corrections are required in order to acquire an accurate result and sample will easily be scratched during the measuring process when using manual four-probe equipment. Therefore, the measurement theory,
4、 software and hardware integration method by virtual instrumentation for thin film resistivity automatic system are of important value.In comprehensive comparative measurement method of resistivity, on the basis of the design USES double electrical measurement group legal measuring film resistivity.
5、 First, system research double electrical measurement is the legitimate film resistivity measurements of the principle with according to measurement requirements, the calculation method of improving resistivity, greatly simplified related correction, improve the reliability and precision measurement
6、 result. Secondly,Based on SCM Rymaszewski four-point probe double electrical measurement group the film resistivity legitimate design automation measuring system. In 8051 under the control of the single chip microcomputer based on CD4052 chip interface circuit implements current probe, voltage prob
7、e to switch, and through the single-chip microcomputer control achieve two voltage measurement; And according to two measurement results programmed Vanderbilt correction factor calculation, and finally achieve the film resistivity of automatic measurement and display, based on the single chip microc
8、omputer 8051 double electrical measurement of four probe film resistivity measuring system. The experimental result shows that the design of automatic measurement system can not only meet a variety of film resistivity measurement requirements, and improve the measuring precision and automation degre
9、e, and streamline film resistivity measurement process.Keywords: dual electro measurement with four point probes; van der Pauw correction factor ; CD4052; Film resistivity目录第一章第一章 绪论绪论.11.1 设计的目的 .131.2 国内外研究进展 .11.2.1 电阻率测量对薄膜材料研究的意义 .21.2.2 电阻率测量技术 .41.3 本章小结 .11 1第二章第二章 四探针电阻率测量原理四探针电阻率测量原理.122.1
10、 四探针基本原理 .122.1.1 体原理 .122.1.2 薄层原理 .142.1.3 测准条件 .152.2 双电测组合法测量原理 .162.3 本章小结 .19第三章 单片机控制技术 .203.1 单片机的结构 .203.2 单片机的指令系统及汇编程序设计 .203.3 单片机的定时器，中断系统以及串行口.213.3.1 单片机的定时器 .213.3.2 单片机的中断系统及串行口 .223.4 单片机的人机交互与扩展技术.233.4.1 单片机的人机交互技术 .233.4.2 存储器的扩展与系统扩展技术 .253.5 单片机应用系统开发与设计.253.6 本章小结 .27第四章第四章 薄膜电阻率测量系统硬件设计薄膜电阻率测量系统硬件设计.284.1 系统设计 .284.2 应用需求分析 .284.3 系统硬件结构设计 .294.3.1 硬件选择 .304.3.2 硬件模块设计 .324.4 本章小结 .34第五章第五章 薄膜电阻率测量系统软件设计薄膜电阻率测量系统软件设计.355.1 薄膜电阻率测量系统软件构思.3545.2 信号采集模块 .375.3 信号处理模块 .375.4 薄膜电阻率的运算模块.385.5 数据的存储与回放模块.415.6 薄膜电阻率测量软件.435.7 本章小结 .
