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1、I金刚石材料的红外透波机理分析专 业：材料成型及控制工程学 生：沈 兆 侠指 导 教 师：陈 荣 发完 成 日 期：2007 年 6 月 9 日扬州大学机械工程学院I中文摘要天然金刚石具有十分优异的光学性能，它在大部分波段具有很高的透过率和折射率以及优异的热导性、化学惰性、力学性能等。CVD 金刚石膜作为一种人工合成金刚石膜也被用作各种光学窗口领域，尤其是雷达等国防设备中。因此，开展金刚石膜在红外透波窗口中的应用研究具有非常重要的实用价值和国防意义。本文主要对光学级金刚石厚膜的抛光加工和对红外透过率性能，进行了比较系统的理论分析和试验研究，所完成的主要工作包括：1、 分析对比了诸多已经面世的金
2、刚石膜抛光方法，并最终根据实际条件选用机械抛光方法对金刚石厚膜进行了抛光加工。通过大量的抛光试验，分析了金刚石厚膜成核面和生长面发生不同抛光结果的原因。2、系统研究了表面粗糙度对红外透过率的影响，获得了透过率随表面粗糙度的变化规律。3、通过对不同厚度玻璃的透过率的测量，得到了厚度对透过率的影响趋势。所取得的结论对金刚石厚膜红外窗口的实际应用具有重要参考价值。关键词：金刚石膜，机械抛光，电火花抛光，红外透过率 IIABSTRACTThe diamond has very excellent optical quality, with very high transmittivity and re
3、fractivity in most spectrums of the wave bands, and also the excellent thermal, chemical, mechanica1 properties. So it makes the CVD (Chemical Vapour Deposition) diamond films be used as the protection films of various optical lenses. Especially used in the radar and other national defense equipment
4、s. Therefore the study on the optical characteristic of the diamond films is thought to have much practical value and national defense meaning.This paper has done a research on the application of diamond films about it is polishing the films,and evaluating the infrared transmittivity.The thesis has
5、carried out systematic theoretical analysis and experiments, obtaining an important result in initial stage. The main work includes:1. Polishing technologies for polishing CVD diamond film have been reviewed, and mechanical polishing methods are chosen according to the actual condition. Through plen
6、ty of polishing experiments, this thesis analyzes the reasons why the crystals nucleating plane and the crystals growing plane of diamond thick films have different polishing results.2. Has studied the surface roughness to the infrared transmissi- bility influence. Has obtained the transmissibility
7、change rule along with the surface roughness .3. By measuring the infrared transmissibility of the silicate glass which have different thickness values, the results of the influence of thickness to the transmissibility of the silicate glass is obtained. The conclusion of the research can shed light
8、on the infrared transmissibility experiments of CVD diamond thick films in future.Key words: diamond films, electro discharge machining polishing, mechanical polishing, infrared transmissibilityIII目目 录录摘要摘要Abstract第一章第一章 绪论绪论.11.1 本文研究背景本文研究背景.11.2 光学级金刚石膜的研究现状光学级金刚石膜的研究现状.41.2.1 光学级金刚石膜的抛光光学级金刚石膜的抛
9、光.41.2.2 光学级金刚石膜的光学性能测试光学级金刚石膜的光学性能测试.51.3 本文主要研究内容本文主要研究内容.5第二章第二章 金刚石膜抛光的实验研究金刚石膜抛光的实验研究.62.1 金刚石膜的电火花抛光金刚石膜的电火花抛光.62.1.1 电火花加工的特点及应用范围电火花加工的特点及应用范围.62.1.2 电火花加工物理过程电火花加工物理过程.62.1.3 电火花加工金电火花加工金刚刚石厚膜的去除机理石厚膜的去除机理.82.1.4 实验条件实验条件.92.1.5 实验结果与讨论实验结果与讨论.102.2 金刚石膜的机械抛光金刚石膜的机械抛光.132.2.1 金刚石膜的机械抛光机理金刚石膜的机械抛光机理.132.2.2 抛光设备抛光设备.142.2.3 抛光工艺抛光工艺.152.3 实验结果及讨论实验结果及讨论.16第三章第三章 表面粗糙度对材料红外透波性能的影响表面粗糙度对材料红外透波性能的影响.183.1 金刚石膜透波性能的应用金刚石膜透波性能的应用.183.2 硅酸盐玻璃表面的抛光硅酸盐玻璃表面的抛光.193.3 表面粗糙度对硅酸盐玻璃的红外透过率研究表面粗糙度对硅酸盐玻璃的红外透过率研究.203.3.1 单面表面粗糙度变化对红外透过率的影响单面表面粗糙度变化对红
