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1、材料表征吴迪南京大学材料科学与工程系2提纲 课程简介 材料与粒子的相互作用 衍射 电子显微 扫描力显微 表面分析手段3第一章 课程简介材料表征课程介绍表征材料微观结构和化学组成的物理方法，包括X射线衍射术、扫描和透射电子显微术、扫描力显微术、X射线能谱、Auger电子能谱、光电子能谱、二次离子质谱以及Raman和红外光谱技术。课程强调对各种表征技术基本原理的掌握和应用。 课程共讲课5260课时，学期末安排810课时有关X射线衍射、扫描和透射电子显微、X射线光电子能谱等仪器的操作演示和实践。 4第二章 射线与物质的相互作用穿透深度和分析深度辐射损伤5第三章 衍射X射线和电子衍射简介可见光衍射的回
2、顾衍射几何劳埃方程和布拉格定律X射线衍射方法粉末衍射傅立叶变换和衍射衍射强度和结构因子衍射角宽度：尺寸效应和晶格畸变电子衍射高分辨X射线衍射：rocking curve和reciprocal space mapping6第四章 扫描力显微术扫描隧道显微术（STM）原子力显微术（AFM）其它扫描力显微术7第五章 扫描电子显微术扫描电镜简介电子枪电子的散射：二次电子和背散射电子光路电子光学简介成像、放大倍数和衬度工作距离、分辨率和景深成像质量及其影响因素样品制备环境扫描电镜（ESEM）X射线能量发散光谱（EDS）X射线波长发散光谱（WDS）背散射电子衍射（EBSD）8第六章 透射电子显微术透射电镜
3、的组成衬度和成像原理透射电镜的基本操作样品制备扫描透射显微（STEM）电子能量损失谱（EELS）9第七章 表面分析技术Auger电子能谱（AES）X射线光电子能谱（XPS）低能电子衍射（LEED）高能反射式电子衍射（RHEED）二次离子质谱（SIMS）10第八章 Raman与红外光谱红外吸收的基本概念影响吸收光谱的因素红外谱仪红外光谱样品制备红外光谱应用举例光散射现象与Raman光谱的基本原理Raman散射的经典理论及量子理论光谱选择定则发光（荧光）的抑制和消除晶格动力学基础Raman光谱的实验装置Raman光谱应用举例11课程目的preparationstructure/compositio
4、npropertiesperformanceTo study synthesis/preparation, structure/composition, properties, performance, and the relationship among these factors.this courseIt is certainly evident that the properties for which materials are selected for a particular application depends on the microstructure which, in
5、itself, can be considered to extend to the atomic level.12How to ?The interaction of electromagnetic radiation with crystalline solids is now understood in considerable detail so that it can be exploited to provide the necessary information.To characterize a microstructure it is necessary to perturb
6、 the material by interacting in some way with it.13photonelectronneutron/protonions/atomsinfrared radiationvisible lightultraviolet radiationX-ray radiationsecondary electronstransmitted electronsback-scattered electronsabsorptionvibrationoptic microscopysurface electron distributionlaser: strong ph
7、oto source, makes detection of weak signals possibleX-ray diffraction/absorptionSEMTEMenergy disperse spectroscopy14Classification of materialsMaterials have been classified in various ways, but perhaps the simplest classification divides into two categories.One based on the nature of the material;
8、NatureCeramicsGlassesMetals and AlloysOther Inorganic MaterialsPolymersElastomersFibersComposite materialsWoodOther biological materials ApplicationsIndustrial materialsElectrical materialsElectronic materialsSuperconducting materialsMagnetic materialsMaterials for energy applicationsOptical Materia
9、lsBiomedical materialsDental materialsBuilding materialsthe other on applications.15CeramicsCeramic engine offers advantages in terms of fuel economy, efficiency, weight savings and performance.16Ceramicssuperconductor17Titanium carbide (TiC) ceramic coatings, which possess excellent resistance to w
10、ear, oxidation and corrosion, as well as having other desirable properties, greatly extends the use of graphites parts.Ceramics18Metals and alloys19Shape memory alloysMetals and alloys20Glasses21The word polymer literally means many parts”: a long chain of covalent-bonded atomsPolymersplastics and e
11、lastomers22PolymersUsage: car parts, food storage, electronic packaging, optical components, and adhesives23glass-fiber/epoxy composite snowboard made of composite materialsComposites24MicrostructuresBonds equilibrium distance r0Bonds in materials fall into 5 categories. ionic bonds covalent bonds m
12、etallic bonds van de Waals force hydrogen bonds25MicrostructuresLatticeUsing the basic symmetry elements of reflection, inversion, rotation and rotoinversion, 14 Bravais lattices exist.26Unit cell27Unit cellThe choice of unit cell is nonexclusive.28Lattice parameters297 types of parallelepiped304 ty
13、pes of lattices3114 Bravais lattices I3214 Bravais lattices II33Crystalline planes34Crystalline planes35Crystalline planes36Crystalline planes37Grain boundaries38edge dislocationsDislocationsscrew dislocations39Point defects40SEM image of a device region on an IC chipExamples41cross-section TEM imag
14、es of an IC chipExamples42oxygenaluminiumtitaniumenergy filtered TEM imageExamples43ZnO nanotubular structureExamples44ZnO nanotubular structureExamples45ZnO nanorod-nanoribbon junctions; the scale bar is 1 m.Examples46ZnO nanorod-nanoribbon junctions; the scale bar is 1 m.Examples47ZnO nanorod-nanoribbon junctionsExamples48The End
