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1、目录摘要IABSTRACTIII第一章绪论11.1选题的意义11.2耐磨涂层的制备技术21.2.1化学气相沉积21.2.2物理气相沉积21.3耐磨涂层的发呈现状51.3.1硬涂层51.3.2软涂层71.3.3硬软复合涂层91.4耐磨涂层的作用机理和影响因素91.4.1刀具磨损的因素91.4.2耐磨涂层的作用机理91.4.3影响涂层刀具性能的因素101.5本课题的背景和由来111.6本课题的研究内容11第二章实验措施及原理132.1磁控溅射离子镀原理与设备132.1.1磁控溅射离子镀原理132.1.2磁控溅射离子镀偏置基体的伏安特性132.1.3封闭场非平衡磁控溅射离子镀设备152.2涂层试样的
2、制备162.2.1基体材料的选用与基体预解决162.2.2涂层沉积工艺设计162.3涂层性能测试192.3.1涂层厚度的测量192.3.2涂层硬度的测试192.3.3涂层附着性的测试202.3.4涂层摩擦性能的测试212.4涂层成分及组织构造分析22第三章多元氮化物涂层的构造和性能研究233.1多元氮化物涂层的性能测试成果233.1.1多元氮化物涂层的厚度233.1.2多元氮化物涂层的硬度233.1.3多元氮化物涂层的附着性233.2多元氮化物涂层的成分及组织构造263.2.1多元氮化物涂层的成分263.2.2多元氮化物涂层的XRD分析283.2.3多元氮化物涂层的TEM分析303.3讨论分析
3、323.4本章小结34第四章MoS2-Ti涂层354.1MoS2-Ti涂层的性能测试成果354.1.1MoS2-Ti涂层的硬度354.1.2MoS2-Ti涂层的附着性354.1.3MoS2-Ti涂层的摩擦性能374.2MoS2-Ti涂层的成分及组织构造384.3讨论分析404.4多元氮化物+MoS2-HTi复合涂层的附着性及分析404.5本章小结42第五章涂层的工业应用435.1涂层在汽车生产业的应用435.2涂层在铝合金加工业的应用445.3涂层在不锈钢加工业的应用475.4涂层工业应用的经济和社会效益485.4.1涂层工业应用的经济效益485.4.2涂层工业应用的社会效益495.5本章小结
4、50第六章结论516.1结论516.2本文的创新点51参照文献52致谢57攻读学位期间刊登的论文58摘要涂层技术是提高刀具性能的重要手段。为了获得性能优良的刀具涂层，本文对多元氮化物涂层和MoS2-Ti涂层的进行了制备和研究，并在实际工业应用中对涂层的使用性能进行了测试，试图找到不同涂层的合用范畴。采用封闭场非平衡磁控溅射离子镀技术制备了TiAlN、CrTiAlN、CrSiN多元氮化物涂层、MoS2-Ti涂层以及多元氮化物+MoS2-Ti复合涂层。通过引入中间过渡层的措施来提高涂层与基体的结合强度。测试了涂层的硬度、附着性和摩擦性能，研究了涂层的成分和组织构造与其硬度、附着性和摩擦性能的关系。
5、并把研制的涂层应用于多种刀具上，加工构造钢、铝合金和不锈钢零件。TiAlN、CrTiAlN、CrSiN多元氮化物涂层的硬度都不小于 HV，其中CrSiN涂层的硬度达到2730 HV。划痕实验表白，涂层与基体的结合强度高，TiAlN涂层的临界载荷Lc58 N，CrTiAlN和CrSiN涂层的临界载荷Lc60 N。CrTiAlN和CrSiN涂层具有优良的综合性能。在基体与多元氮化物涂层之间加入Ti/TiN或Cr/CrN中间过渡层大大提高了涂层的附着性， Cr/CrN中间过渡层的效果更好。MoS2-Ti涂层具有类似非晶的构造，共沉积的钛原子间隙固溶于相邻的硫原子层之间，涂层的无序度随钛含量的升高而增
6、大。MoS2-Ti涂层具有优秀的附着性，临界载荷Lc100 N。MoS2-Ti涂层的硬度随钛含量的升高而提高，MoS2-HTi涂层的硬度为980 HV，比MoS2涂层的硬度550 HV高将近一倍。在大气环境中的球盘磨损实验显示，MoS2-HTi涂层的耐磨性比MoS2涂层好，MoS2-HTi涂层的比磨损率为3.210-17 m3N-1m-1。MoS2-Ti涂层的摩擦系数随钛含量的升高而稍微增大，并且高载荷下摩擦系数较小。MoS2-HTi涂层的摩擦系数低于0.07，保持了MoS2涂层低摩擦的特性。MoS2-Ti涂层不仅与高速钢基体具有优秀的结合性，还能与多元氮化物涂层形成较好的结合，多元氮化物+M
7、oS2-Ti复合涂层也具有优良的附着性。研制的多种涂层在多家公司选择了多种刀具进行现场实验，针对不同切削加工条件，特别是难加工材料，调节涂层成分、构造，优化涂层种类和工艺，使工具使用寿命提高了19倍，被加工零件表面精度也明显提高，达到了国内外同类产品的先进水平，具有较好的经济效益和社会效益。核心词：磁控溅射离子镀，CrTiAlN，CrSiN，MoS2，涂层刀具ABSTRACTCoating technique is an important means to improve performance of cutting tools. For preparation of coatings wi
8、th excellent properties, multicomponent nitride (MCN) coatings and MoS2-Ti composite coatings were prepared and investigated in this thesis. And performances of these coatings were tested in practical industrial application, attempting to discover the better applicable cases of various coatings.TiAl
9、N, CrTiAlN, CrSiN multicomponent nitride coatings, MoS2-Ti coatings and MCN+MoS2-Ti composite coatings are prepared by closed field unbalanced magnetron sputtering ion plating. Incorporating interlayer and transition layer in order to improve the adhesion strength of the coatings. The effects of coa
10、ting composition and texture on coating hardness, adhesion and tribological properties were investigated. Various tools coated with the different coatings were applied to cutting constructional steel, aluminum alloy and stainless steel parts.All hardness of the MCN coatings is higher than HV. The ha
11、rdness of CrSiN coating reaches to 2730 HV. Scratch tests indicated that the MCN coatings have good adhesion. Critical load (Lc) of the TiAlN coating is 58 N. Critical load (Lc) of the CrTiAlN and CrSiN coatings are high than 60 N. The CrTiAlN and CrSiN coatings have good mechanical properties. Inco
12、rporating Ti/TiN or Cr/CrN interlayer and transition layer can greatly improve adhesion of the MCN coatings, and the Cr/CrN interlayer has better effect.The MoS2-Ti coatings are quasi-amorphous structure. Co-deposition titanium atom is in the space between the sulfur planes forming an interstitial s
13、olid solution of Ti in MoS2. Disorder of the coatings enhance with the increase of Ti content. The MoS2-Ti coatings have excellent adhesion (Lc100 N). The hardness enhance with Ti content increasing. The hardness of the MoS2-HTi coating is 980 HV, about twice of that of the MoS2 coating (550 HV). Pi
14、n on disc tests in atmosphere showed that the MoS2-HTi coating is more wear resistant than the MoS2 coating. The specific wear rate of the MoS2-HTi coating is 3.210-17 m3N-1m-1. The friction coefficients of the MoS2-Ti coatings slightly increase with the Ti content increasing, and the friction coeff
15、icients are lower on higher load. The friction coefficient of the MoS2-HTi coating is lower than 0.07, retaining the low friction character of the MoS2 coating.The MoS2-Ti coatings have excellent adhesion strength not only with high speed steel substrate, but also with multicomponent nitride coatings. So the MCN+MoS2-Ti composite coatings have good adhesion too.Various tools were coated with the different coatings for field test in several factories. For different cutting conditions e
