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1、UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Introduction on Fab flow and semiconductor industry- for IT related employeeMorris L. YehUMC.Fab8AB.PEI.Logic2UMC Confidential, No Disclosure Data Prepared by Da
2、ta Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 2Outline 1. Fab flow and Transistor working2. IC manufacturing chain3. Filed application4. The TrendUMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI
3、.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 3The Roadmap UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 41.1 Transistor Working1. Whats the Transistor ?2. Whats the Transistor structure ?3. Hows the transistor
4、working ?4. Transistor and System revolution3.1 Hows the clock running in the transistor ring?3.2 Hows the information broadcasting in a system ?UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 51. Whats t
5、he Transistor ?Transistor WorkingIn Digital application, the transistor play the role of switch in the system just like a mechanical switch , it means that the key component to storage the 0 and 1 State 1State 0But we deployed the Solid-State and Quantum physics to realize the solid-state switch - T
6、ransistor in silicon industry, its more size shrinkage, high speed, high performance and lower energy required than the prior arts.State 1State 0UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 62. Whats t
7、he Transistor structure ?Transistor WorkingGate OxideUMC.Fab8B. Generic 0.25um logic Ti-Salicide ProcessPolyTiSi2SpacerSourceDrainChannel LengthLDDPOLYThe transistor included 3 terminal which likes the switch : 1. Poly Gate play the role of control or input terminal, the Drain play the role of outpu
8、t terminal and the Source play the role of reference or ground.UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 73. Hows the transistor working ?Transistor WorkingState 1Drain Bias (charge)TimesLevel (V)St
9、ate 0Gate Bias (discharge)TimesLevel (V)State 1Drain Bias (recharge)TimesLevel (V)Voltage on the Drain terminal (output)=In the Digital application, the transistor behaviors more likes a Capacitor :1. Drain Bias ( Capacitor Charge ) : The charge storage on the Drain side.2. Gate Bias ( Capacitor Dis
10、charge ) : The storage charge flow from Drain to Source3. Drain Bias again ( Gate floating, Capacitor Recharge ) : The charge storage again.UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 83.1 Hows the cl
11、ock running in the transistor ring?The video shown the 49 stages NOT gate series which constructed the ring oscillator, In the left NOT gate diagram, if the input terminal become state 0, the PMOS was turn ON, and NMOS turned off, it means that the Vcc flow into Output terminal, the Output state bec
12、ome 1, and according quantum physics, the current flow the channel means that electron-hole pair recombination, and the light emission will be detected by the cooled infrared camera.The Ring Oscillator was the tool to measure the system clock and speed.GNDVccOutputInputPMOSNMOSNOT GateState 0OnOffSt
13、ate 1State 1OffOnState 0UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 93.2 Hows the information broadcasting in a system ?Generally, theres a few people could understood the information broadcasting in
14、a chip, especially on the system debug, the product engineer hard to detect the defect in system level. The liquid-nitrogen-cooled infrared Camera could detect the hot spot emission which generated by the electron-hole pair combination. The defect could be detected once the signal flow to the defect
15、 node, the system will be hold and hot spot frozen on the defect node.UMC Confidential, No Disclosure Data Prepared by Data Prepared by Morris L.Yeh Morris L.Yeh umc.Fab-8AB.PEI.Logic-2 umc.Fab-8AB.PEI.Logic-2Page 10FIG. 1. The first transistor. Brattain and Bardeens pnp point-contact germanium transistor operated as a speech amplifier with a power gain of 18 on December 23, 1947. (B
