电子级指标

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1、 电子用氟化氢铵溶液指标电子用氟化氢铵溶液指标指标项目低尘高纯MOS主含量（以 NH4F 计）%33.8-35。833.8-35。8（以 HF 计）%5.9-6。95.9-6。9氯化物，ppm 84硫酸盐，ppm 22磷酸盐，ppm 11锂，ppm 10.1砷，ppm -钠，ppm 10.1镁，ppm 10.5铝，ppm 10.5钾，ppm 10.1金，ppm -0.1锑，ppm -0.1镍，ppm 0.30.1钙，ppm 10.5钛，ppm -0.1铬，ppm 0.10.1锰，ppm 0.50.1铁，ppm 10.5铜，ppm 0.30.1锌，ppm 0.50.1钴，ppm 0.5-铅，pp

2、m -0.1镓，ppm 0.50.1砷，ppm 0.30.1钼，ppm -0.1银，ppm 0.50.1镉，ppm 0.50.1铟，ppm -0.1锡，ppm 0.50.1钡，ppm 10.1铂，ppm -0.1铋，ppm -0.1灼烧残渣（以 SO4计）50ppm40ppm颗粒，个/mL （10m）30（5m）27电子用氟化铵溶液指标电子用氟化铵溶液指标指标项目低尘高纯MOSBV-1SEMI C1SEMI C7SEMI C12主含量（NH4F）%39.0-41。039.0-41。040.0-41。939.0-41。039.0-41。039.0-41。0色度（APHA）-101010水溶液 P

3、H 值（1%）6.0-7。56.2-7。06.1-6。76.5-7。56.5-7。56.5-7。5氯化物，ppm 840.5422硫酸盐，ppm 221222硝酸盐，ppm -1033磷酸盐，ppm 110.410.50.5锂，ppm 10.10.005-0.010.001钠，ppm 10.10.050.30.010.001镁，ppm 10.50.050.20.010.001铝，ppm -0.50.050.20.010.001钾，ppm 10.10.050.30.010.001金，ppm -0.10.003-硼，ppm -0.20.010.001钒，ppm -0.010.001锶，ppm -0

4、.001-锑，ppm -0.10.01-0.010.001铍，ppm -0.005-镍，ppm 0.30.10.0050.30.010.001钙，ppm 10.50.050.20.010.001钛，ppm -0.10.0050.30.010.001铬，ppm 0.10.10.0050.10.010.001锰，ppm 0.50.10.0030.20.010.001铁，ppm 10.50.050.20.010.001铜，ppm 0.30.10.0050.10.010.001锌，ppm 0.50.10.0050.20.010.001钴，ppm 0.50.10.005-铅，ppm 10.50.0050

5、.30.010.001镓，ppm 0.50.10.005-砷，ppm 0.10.050.020.030.010.001钼，ppm -0.10.005-银，ppm 0.50.10.005-镉，ppm 0.50.10.005-0.010.001铟，ppm -0.10.005-锡，ppm 0.50.0030.20.010.001钡，ppm 1-0.005-0.010.001铂，ppm -0.005-铋，ppm -0.005-灼烧残渣（以SO4计） ，ppm 50-颗粒，个/mL （10m）30（5m）25（2m）3（1m）25（0。5m） 25（0。2m）TBD电子用过氧化氢溶液指标电子用过氧化氢溶

6、液指标指标项目低尘高纯MOSBV-1SEMI C1SEMI C7SEMI C8SEMI C12Grade5主含量（以 H2O2计）30.0%30.0%30.0%30.0-32。0%30.0-32。0%30.0-32。0%30.0-32。0%30.0-32。0%杂质最高含量（以 10-6计）不挥发物，ppm 5050-游离酸（以 H2SO4计）40ppm 40ppm 40ppm -氮化合物，ppm 444-硝酸盐，ppm -0.4000.4000.0300.030氯化物，ppm 20.50.520.2000.2000.0300.030硫酸盐，ppm 520.550.20.20.0300.030磷

7、酸盐，ppm 220.420.20.20.0300.030总碳（TOC） ，ppm -2020101010镁，ppm 10.10.020.10.0100.0010.00010.00001铝，ppm 10.50.0510.0100.0010.00010.00001钾，ppm 10.20.0210.0100.0010.00010.00001锶，ppm -0.001-钙，ppm 10.20.050.20.0100.0010.00010.00001钛，ppm -0.10.0050.30.0100.0010.00010.00001钒，ppm -0.0100.0010.00010.00001铬，ppm 0

8、.50.020.0050.0500.0100.0010.00010.00001铍，ppm -0.005-金，ppm 0.50.050.003-银，ppm 0.50.020.005-硼，ppm 0.50.020.010.10.0100.0010.00010.00001钠，ppm 10.50.0510.0100.0010.00010.00001钼，ppm -0.10.005-镉，ppm 10.050.005-0.0100.0010.00010.00001铟，ppm -0.020.005-锂，ppm 10.020.005-0.0100.0010.00010.00001锰，ppm 10.050.003

9、0.050.0100.0010.00010.00001钴，ppm 0.50.020.005-镍，ppm 0.10.050.0050.050.0100.0010.00010.00001铜，ppm 0.10.020.030.0500.0100.0010.00010.00001锌，ppm 10.10.01-0.0100.0010.00010.00001砷，ppm 0.10.050.010.010.0050.0010.00010.00001镓，ppm 0.50.020.01-铅，ppm -0.050.0050.30.0100.0010.00010.00001铋，ppm -0.020.01-锡，ppm

10、10.050.0310.0100.0010.00010.00001锑，ppm -0.020.03-0.0050.0010.00010.00001钡，ppm 10.10.05-0.010-0.00010.00001铂，ppm -0.10.003-铁，ppm 0.50.10.020.10.0100.0010.00010.00001颗粒，个/mL （10m）30（5m）27（2m）3（1m）25（0。5m） 25（0。5m）5（0。2m）TBD（0。2m）TBD电子用异丙醇指标电子用异丙醇指标指标项目低尘高纯MOSBV-1SEMI C1SEMI C7SEMI C8SEMI C12含量（GC） % 9

11、9.599.799.899.599.899.899.8电阻率 M101020-色度（APHA）10101010杂质最高含量（以 10-6计）不挥发物，ppm 5515555氯化物，ppm 21-0.20.20.0500.050硝酸盐，ppm -0.0500.050硫酸盐，ppm -1-0.0500.050磷酸盐，ppm -0.50.50.0500.050游离酸（以 CH3COOH计） ，ppm -10200.2eq/g-碱度-0.1eq/g-硫酸试验合格合格合格-水溶解试验-合格合格-水分(H2O)，ppm 20001000500500500500500钠，ppm 10.50.050.10.0

12、100.0010.0001镁，ppm 10.010.0010.10.0100.0010.0001镍，ppm 0.10.010.0010.10.0100.0010.0001铜，ppm 0.10.010.0010.10.0100.0010.0001锌，ppm 10.010.0010.10.0100.0010.0001锰，ppm 10.050.0010.10.0100.0010.0001铁 ，ppm 0.20.10.0010.10.0050.0010.0001银，ppm -0.002-钡，ppm -0.005-0.0100.0010.0001钙，ppm -0.0030.10.0100.0010.00

13、01铬，ppm -0.0050.10.0100.0010.0001镉，ppm 10.0050.001-0.0100.0010.0001铅，ppm 0.050.010.0030.10.0100.0010.0001铝，ppm -0.0050.10.0100.0010.0001锑，ppm -0.0010.0001砷，ppm -0.010.0100.0010.0001硼，ppm -0.010.0100.0010.0001锡，ppm -0.10.0100.0010.0001钛，ppm -0.10.0100.0010.0001钒，ppm -0.0100.0010.0001锶，ppm -0.001-钾，pp

14、m -0.0030.10.0100.0010.0001锂，ppm -0.001-0.0100.0010.0001钴，ppm 0.10.010.001-颗粒，个/mL （10m）30（5m）27（2m）3（1m）25（0。5m） 25（0。5m）5（0。2m）TBD电子用丙酮指标电子用丙酮指标指标项目低尘高纯MOSBV-1含量（GC） % 99.099.599.5电阻率 M5520杂质最高含量（以 10-6计）水分，ppm 500200200不挥发物，ppm 551游离酸（以 CH3COOH 计） ，ppm202010游离碱（以 NH3计） ，ppm515水溶解试验-合格高锰酸钾还原物质合格合格合格钠，ppm 10.50.01镁，ppm 10.050.001锰，ppm 10.010.001银，ppm -0.002锂，ppm -0.001镍，ppm 0.010.010.001铜，ppm 0.050.010.001锌，ppm 10.010.001镉，ppm 10.0050.001铁，ppm 0.050.050.001铝，ppm -0.005钡，ppm -0.005钙，ppm -0.003铬，ppm -0.005钾，ppm -0.003锶，ppm