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1、15. Diagnostics and Troubleshooting15.诊断和故障The WT-2000 is designed for years of r eliable operation. In the event that a problem occurs, refer to this chapter for procedures you can follow to diagnose the cause of the problem. In section 15.1, the user can find the terminology section, which describ
2、es the different parts of the system. It is necessary to understand the terminology in order to do effective troubleshooting. Later sections contain a collection of possible problems and the methods to eliminate them. The topics are organized as shown below:WT-2000 年 r eliable 运作设计。在该事件中出现问题，请参阅本章程序
3、您可以按照来诊断问题的原因。第 151 条用户可以找到条术语描述系统的不同部分。有必要了解术语做有效的疑难解答。后面各节包含可能存在的问题和消除这些方法的集合。该主题组织，如下所示： Communication Problems, section 15.2 Problems at Initialization, section 15.3 4 Problems during measurement, section 15.4 -PCD Lifetime Measurement Errors, section 15.5 JPV Measurement Errors, section 15.615.
4、1 Terminology 术语This section defines the names of the parts in the system. 该章节定义了系统内各个部件的名称。Section 15.1.1 describes parts of the scanner unit,section 15.1.2 describes parts of the industrial computer,and section 15.1.3discusses the operational software, including the System Diagnostic file.15.1.1章节
5、阐述扫描单元的部件。15.1.2章节阐述了工业计算机的部件。15.1.3章节讨论了运行软件，包括系统的诊断文件。15.1.1 Parts of the Scanner Unit15.1.1扫描仪单元的部件15.1.1.1 Measurement Stage15.1.1.1测量工作台The measurement stage (Figure 15-1) holds the sample. In the middle of the measurement stage, there are the vacuum chuck, which fixes the sample during the mea
6、surement, and the optional wafer lift pins which lift up and put down the wafer.如图15-1 示，测量工作台装有样品。在测量工作台中间，有一个真空吸口，用来在测量期间固定样品。可选硅片升降针，用来升高或降低硅片。Figure 15-1: Measurement stage 测量平台On the right side of the measurement stage there are some outlets (Figure 15-2).（图 15-2）测量工作台右侧有一个出口。Figure 15-2: Outle
7、ts on the right side of the measurement stage 图 15-2： 测量工作台右侧的出口The top one is the wafer lift cable (optional).顶部一个是硅片升降线。（可选项）The second one (from the top) is the ground (GND) cable. 从顶部向下数，第二个是地线，GNDWhen the measurement stage is in the system, the GND cable must be connected.测量工作台的地线必须系统接地。The thi
8、rd one (from the top) is the vacuum cable. When the measurement stage is in the system it has to be connected.The bottom one is the wafer lift cable (optional).第三个是真空管，测量工作台在系统中必须连接，底部是硅片升降线。15.1.1.2 Bridge 横梁The bridge holds the measurement head with the rail and it moves above the measurement stag
9、e. See Figure 15-3.横梁包括有导轨的测量探头，并向上移动测量平台，见图15-3示。15.1.1.3 Measurement Head 测量探头All measurement units are in the measurement head. The most frequent units are the following:所有测量单元都在测量探头内部。大部分常见单元如下： Optical finder sensor, 光感式传感器 Capacitive finder sensor, 电容式传感器 Temperature sensor (optional), 温度传感器（可
10、选项） -PCD microwave unit/-PCD head (optional), -PCD微波单元/-PCD 探头（可选项） SPV sensor/head (optional), SPV传感器/探头（可选项） LBIC measurement unit/head (optional), LBIC测量单元/探头（可选项） Resistivity/eddy measurement sensor (optional), 电阻率/eddy 测量传感器（可选项） Kelvin head/sensor (optional) 开尔文探头/ 传感器（可选项） SHR measurement hea
11、d/sensor (optional) SHR测量探头/传感器（可选项）Some typical measurement units are shown in Figure 15-4.一些典型的测量单元如15-4 所示。Additional measurement units are shown in Figure 15-5 and Figure 15-6.其它测量单元如图 15-5 和 15-6 所示。Figure 15-6: SPV sensor/head15.1.1.4 Indexer for Automatic Loading (Optional)The indexer (elevat
12、or) (Figure 15-7) unit is used for automatic loading. The wafer cassette ispositioned on the platform of the indexer when the system operates in automatic wafer loadingmode.图 15-6： 专用汽车传感器/头 15.1.1.4 索引器的自动加载 （可选） 的索引器 （电梯） （图 15-7） 单位用于自动加载。晶圆片盒式定位平台的索引器时自动加载模式的晶圆该制度的运作。Figure 15-7: Indexer15.1.1.5
13、 Loading Arm (Optional)The loading arm (Figure 15-8) removes (replaces) wafers from (to) the cassette and places to(picks from) the measurement stage.图 15-7： 索引器 15.1.1.5 加载臂 （可选） 的加载臂 （图 15-8） 移除 （替换） 晶圆从 (对 ) 磁带并放到 （从镐） 测试阶段。Figure 15-8: Loading arm15.1.1.6 Shutter (Optional)The shutter (Figure 15
14、-9) protects the wafers in the cassette from the high intensity lightillumination (flash) during the Fe concentration measurement.图 15-8： 加载臂 15.1.1.6 快门 （可选） 的快门 （图 15-9） 从高强度光照明 (闪存) 铁浓度测量过程中保护在卡带晶圆。Figure 15-9: Shutter15.1.1.7 Flash Unit (Optional)This unit (Figure 15-10 and Figure 15-11) creates
15、 the high intensity light illumination (causingFe-B pair dissociation) for the Fe concentration measurement.图 15-9: 15.1.1.7 快门闪存设备 （可选） 本单元 （图 15-10 和图 15 11） 创建高强度光照明 （导致铁 B 对离解） 铁浓度测量。Figure 15-10: Flash lamp with flash interface图 15-10： Flash 灯，闪存接口Figure 15-11: Flash lamp generator 图 15-11： Fla
16、sh 灯发电机15.1.1.8 Back Panel (Signal Distributor Board) 15.1.1.8 步小组 （信号分发服务器委员会）This board is the interface between the interconnect cables and the system. This board is behindthe gray metal plate in the system (see Figure 15-12). The gray plate is on the back side of theolder systems, while it is on the right side of newer systems.Fi
