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1、2007 DISCO G TECHNOLOGY SHANGHAI All rights reservedThank you for requesting Disco Test cut services.Herein we include the results of the requested processing for your evaluation.Due to the quantity of samples, further testing may be necessary to confirm these results. EAD seriesCSP alignment dataDI
2、SCO TECHNOLOGY SHANGHAI.Prepared byJason MaAs this document includes important technical information of the addressed company,do not disclose to outside DISCO or the addressed company.Confidential (For Addressed Company and DISCO Group) /AP R&D dept. For CE-self2007 DISCO TECHNOLOGY SHANGHAI All rig
3、hts reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.CONTENTS1.Measure alignment data setting 3,4,5,6-132.Least Sqr function 14 3.Multiple mount 154.Cutting order setting 165.Special alignment data 176.Example onDAD3350 .18,19,20,2122007 DISCO TECHNOLOGY SHANGHAI All rights r
4、eservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Search position: 目标寻找位置的数量No:在做校准时,将会寻找每个张产品的最上的点 (1,)1 point:在做校准时,将会寻找每个block的最上的点 (1,7,13)2 point:在做校准时,将会寻找每个block的最上和最下的点(1/6 7/12 13/18)All point:在做校准时,将会寻找每个block的所有的点.(1,2,3,4,5,6 7,8,9,10,11,12 13,14,15,16,17,18)32007 D
5、ISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Alignment pattern: 目标寻找类型A:在做teach和校准时,只找一个特征点AB:在做teach和校准时,要找两个特征点n 如果产品的敲曲度比较大或精度差,建议采用AB模式42007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco
6、Group)/AP R&D dept.Position of first line: 目标寻找位置Edge:在产品的左上脚,做校准Center:在产品的中心做theta 校准n 一般选择Edge,除非是非常特殊的产品选Center52007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.:Adjust mode (first line): 每个Block的第一条切割道的校准方式是否采用theta校准Y-ADJ:只做Y方向的
7、校准 1A ,7A,13AT-ADJ:做Y和T方向的校准 1A/1B 7A/7B 13A/13B 两点成一线T-ADJ2:做普通校准时和T-ADJ一样,在做最小二乘法 时,要将该功能激活n 一般选用T-ADJ功能 如果产品的敲曲度比较大或精度差,建议采用T-ADJ2& leastSqrTAdj模式62007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.:Adjust mode (first line): 每个Block的
8、第一条切割道之后的校准是否采用theta校准Y-ADJ:只做Y方向的校准 2-6A ,8-12A,13-18AT-ADJ:做Y和T方向的校准 2-6A/2-6B 8-12A/8-12B 14-18A/14-18BT-ADJ2:做普通校准时和T-ADJ一样,在做最小二乘法 时,要将该功能激活n 一般选用T-ADJ功能 如果产品的敲曲度比较大或精度差,建议采用T-ADJ2& leastSqrTAdj模式A6-2B6-2B12-8B18-14A18-14A12-872007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For
9、Addressed Company and Disco Group)/AP R&D dept.T-divided alignment: T角度偏差是否要平均化,要在下列功能被激活才能使用.Search position:2-point 或All pointAdjust mode (first line ):T-ADJ或T-ADJ2(Subsequence ):T-ADJ或T-ADJ2只能是单轴切割.如果使用Dual或Step,该功能会自动关闭Yes: 会在每条切割道中,将T角度偏差平均化NO:只在做校准的切割道中,将T角度偏差平均化Next2pointCenterT-ADJT-ADJAB820
10、07 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.n相同的工件,在是否使用T平均化功能,有着不同的结果 Yes: T偏差平均到每条切割道 No: T偏差只在每个block的最后两条切割道补偿92007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.T
11、arget exist with street:特征点和切割道位置的关系:1-By-1:在切割道之外的特征点Between:在切割道之 内的特征点102007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept. Distance between workpiece 8&9:多片工件同时切割时,工件和工件间的距离.如果Muti Mount 的功能被激活,这里只要设0. Batch sequence 10: YES,多片工件先全部
12、做好校准后, 再同时切割,机器会自动记录好每一片工件的切割位置. NO:多片工件.做一片校准,切割一片. Use Z2 microscope 11: 在做校准时,Z2的高倍显微镜YES/NO是否使用,用以提高校准时间. 112007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Macro alignment 12: 底倍目标点校准模式 NO 在做底倍校准时,不执行Y和T的校准 Y-ADJ.只做Y方向的A校准,但不执行T校
13、准 T-ADJ: 执行A校准后,在做B校准.两点成直线,但目标点的形状都是一样的 ABMacro:执行A校准后,在做B校准.两点成直线,但目标点的形状都是不同的 n一般使用T-ADJ122007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Macro edge search 13:底倍边缘目标寻找. Yes,先找工件的边缘,后去寻找校准点. No:该功能不用Correction limit 14&15: 在做校准时,Y和
14、T的极限值.如果超过极限值,会出现报警. n 如果产品的敲曲度比较大或贴片精度差或目标点与目标点靠的太近,为了防止校准点找错,而切偏.建议采用YES132007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.5.0mm10mmEx: Repeat index 重复步进 CH1-1:25mm (5X5index ) CH1-2:10mm (block和和block 间的距离的距离) 在做高倍校准时CH1将做8个点,自动换算成
15、平均值,8点成一直线.产品的敲曲度比较大或精度差时.相对于普通的两点成直线的精度较高n 如果如果产品的敲曲度比品的敲曲度比较大或精度差大或精度差,建建议采用采用该模式模式,同同时将将T-ADJ2激活激活Adjust limit:校准极限,如果8个点中有一个或几个大于极限值时,会产生报警142007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.多工件切割,就要使用该功能,将工件的坐标输入EX:,台盘上有三张工件, 1:Us
16、e code data 2:Number of workpiece 输入3, 3:点击F10,进入Measure 2 ,依此校准工件 1,2,3 的左上角的坐标点3152007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Cutting orderCutting order: 切割顺序 激活Use cuting line order data.如果不激活,机器会自动控制件 选择在Squ1 Z1&Z2同时表切CH1的第1和
17、第8条,.如果不选,是先Z1切CH1的第一条,后Z2切第八条Z2Z111118818162007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Special alignmentCH1CH220mm100mmX:在做校准时X方向,底倍和高倍校准点的距离Y:在做校准时Y方向,底倍和高倍校准点的距离T:在做校准时T方向,底倍和高倍校准点的距离粗调寻找范围:在底倍校准时,以校准点的周围多少距离来寻找172007 DISCO TE
18、CHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.Example on DAD335010mm5mm5mm165mm185mm35mm 55mm182007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.u 编辑产品参数u 选择特殊校准模式192007 DISCO TEC
19、HNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.u 编辑校准参数u 编辑校准模式202007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept.u 编辑切割顺序CH1CH2Z-1Z-8Z-1Z-30212007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept. END222007 DISCO TECHNOLOGY SHANGHAI All rights reservedConfidential (For Addressed Company and Disco Group)/AP R&D dept. 结结束束语语若有不当之处，请指正，谢谢！若有不当之处，请指正，谢谢！
