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1、洁净室(区)空气洁净级别表洁净度级别尘粒最大允许数/立方米0o 5pm尘粒数5pm尘粒数微生物最大允许数浮游菌/立方米沉降菌/皿100级3,50005110, 000 级350,0002,0001003100,000 级3, 500, 00020,00050010300, 000 级10,500, 00060,000100015ISO14644-1 (国际标准)空气洁净度等级(N)大于或等于所标粒径的粒子最大浓度限值(空气粒子数个/立方米)0o 1um0.2um0o 3um0o 5um1.0um5.0umISO Classi102ISO Class210024104ISO Class31, 0
2、00237102358ISO Class410,0002,3701, 02035283ISO Class5100,00023,70010,2003, 52083229ISO Class61,000, 000237, 000102,00035,2008, 320293ISO Class7352, 00083, 2002,930ISO Class83,520, 000832,00029,300ISO Class935,200, 0008,320,000293, 000注:由于涉及测量过程的不确定性,故要求用不超过三个有效的浓度数字来确定等级水平各国洁净度等级近似对照表个/M0o 5umISO 14
3、644-US 209EC1992)US 209D (1988)EEC cGMP(1989)FRANCE AFNOR(1981)GERMANYVDI2083 (1990)JAPAN JAOA (1989)1-3o 52-0210.0M1-35.33M1o 51-13100M2-3534M2o 510-241,000M3-3, 5305M3.5100A+B4, 0003510,000M4-35, 3006M4。51, 0001,000-46100, 000M5-353,0007M5。510, 000C400, 000571, 000, 000M6-3, 530,0008M6。5100, 000D4,000, 0006810, 000, 00-M7-洁净室及洁净区空气中悬浮粒子洁净度等级空气洁净度等级(N)大于或等于表中粒径的最麦大浓度限值(pc/m3)0.1um0。2um0。3um0。5um1um5um1102210024104310002371023584 (十级)1000023701020352835 (百级)10000023700102003520832296 (千级)10000002370001020003520083202937(万级)3520008320029308(十万级)3520000832000293009 (一百万级)352000008320000293000