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1、ARTICLE IN PRESSAvailable online at ScienceDirectMechanism and Machine Theory xxx (2007) xxxxxxMechanismandMachine T design of large displacement precision XYpositioning stage by using cross strip flexure joints andover-constrained mechanismYeong-jun Choi *, S.V. Sreenivasan, Byung Jin ChoiDepartmen
2、t of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712, USA Received 14 February 2005; accepted 22 May 2007AbstractFlexures are widely used in precision machines since they offer frictionless, particle-free, and low maintenance operation, and they provide extremely high resolut
3、ion. A large displacement precision XY positioning stage is designed by using cross strip flexure joints. An over-constrained mechanism is used to incorporate symmetry to cancel out the effects of center shifting in large-motion flexures. Advanced kinematic techniques such as screw system theory are
4、 used to achieve a good kinematic design. Existing flexure-based translation stages usually have motion range to size ratios of less than 0.01 as compared to 0.25 or higher in this research. It is believed that large-motion flexure-based XY stages can be a cost-effective solution for semiconductor a
5、pplications, particularly the ones that operate in vacuum. 2007 Elsevier Ltd. All rights reserved.Keywords: Flexure; Motion stage; Screw system theory; Over-constrained mechanism1. IntroductionAs an effort to eliminate undesirable characteristics such as friction and backlash in traditional joints,
6、a flexure joint was proposed in the 1960s 6. Flexure joints do not have stickslip friction or backlash. Additional advantages of flexure joints are that they are wear-free and can be made as a monolithic element. If the forcedisplacement curves are known, then the displacements that are continuous a
7、t all ranges can be calculated from the external force. However, these flexures have disadvantages such as the limited range of motion.Some researchers have developed high precision positioning systems using flexure joints. Rong and Zhu 8 designed and analyzed a flexure-hinge mechanism that has a mo
8、tion range of 100 lm and a positioning accuracy of 0.1 lm. Single-axis flexures and piezoelectric actuators were used in the motion stage. Yang et al. 13Corresponding author. Present address: Molecular Imprints, Inc., 1807 West Braker Ln., C-100, Austin, TX 78758, USA. Tel.: +1 512 339 7760; fax: +1
9、 512 339 3799.E-mail address: (Y.-j. Choi).0094-114X/S - see front matter 2007 Elsevier Ltd. All rights reserved. doi:10.1016/j.mechmachtheory.2007.05.009Please cite this article in press as: Y.-j. Choi et al., Kinematic design of large displacement precision XY ., Mech. Mach. Theory (2007), doi:10
10、.1016/j.mechmachtheory.2007.05.009ARTICLE IN PRESS2Y.-j. Choi et al. I Mechanism and Machine Theory xxx (2007) xxx-xxxdeveloped a micro-positioning stage that was actuated by piezo actuator and guided by structure based on flexure joints. The motion range of that stage was only 200 (im. The comparis
11、on of static and dynamic characteristics between analytical model and FEM model was completed in that research. Ryu et al. 9 developed a flexure hinge based XY9 stage which has the total range of 41.5 x 47.8 (im. They presented an optimal design method. Tajbakhsh et al. 11 used flexures to make a th
12、ree D.O.F. optic mount with the motion limit of 100 (im. Commercially Physik Instrumente 7 are selling P-731 Series XY Piezo Flexure Nano Positioners which can travel in ranges of 100 x 100 (im. It uses low voltage PZTs (0-100 V) and flexures are used as the drive and guiding system. Integrated capa
13、citive position feedback sensors provide sub-nanometer resolution. The flexures provide zero sticktion/friction, ultra-high resolution and exceptional guiding precision. All positioning stages developed so far can give a few hundreds of micrometer motion range, because notch type flexure joints are
14、adequate for small motion range.In order to use flexure joints in large-motion range, some researchers made dual servomechanism that has a fine motion stage mounted on a coarse motion stage. They incorporated flexure joints in fine motion stages. Lee and Kim 3 presented an ultra precision three D.O.
15、F. stage for alignment of wafers in micro lithography. For high precision, they adopted a dual servo system and used flexures and piezoelectric actuators in the fine motion stage. The working range was 200 x 200 mm. Lee et al. 4 developed an ultra precision positioning system using a dual servomecha
16、nism that consists of the global stage and the micro stage. The global stage can travel 40 cm and include a ball screw that has the position accuracy of 5 (im. Piezoelectric actuator actuates the micro stage connected by flexures. Dual servo stages make the whole stage complex, and errors associated with coarse motion sta
