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1、纳米光子学：概述 NSF-RISE Workshop July 9-14, 2007Anup Sharma Department of Physics Alabama A FUV or VUV) extreme UV (131 nm; EUV or XUV). I. LITHOGRAPHY: Drawing patterns on substratesII. Biological Substrates Examples of Substrates used to immobilize biological molecules: 1.Biomembranes for Protein immobi
2、lizationModel biomembraneExample:Phosphatidylcholine (Egg PC)C. K. Yee et. al., Adv. Mater. 2004, 16, 1184A. Sharma et. al., Optics Letters 2005, 30, 501Cooper et. al. Anal Biochem. 2000, 277, 196-205. Sensor for Cholera ToxinA. Swanson et. al., United States Patent 6893814 Influenza Sensor II. Biol
3、ogical Substrates2. Biocompatible Polymers for immobilizing DNA, tissue fragments. Example: Poly-Amino acids (Poly-L- Lysine) film coated on glass substrateIt attaches ionically to the phosphate group of the DNA backbone. Subsequent UV-light exposure is used to cross-link oligonucleotides to the Pol
4、ymer surface. Erie Scientific Poly-L-Lysine slidesUsed in fabrication of DNA MicroarraysG. C. Vivian et. al., Nature Genetics supplement, 1999, 21, 15-19.II. Biological Substrates3. Micro/Nanoporous polymer films for encapsulation of biomolecules Example: Nanoporous poly(methylsilsesquioxane) (PMSSQ
5、) thin films on Silicon substrate Porous Sol-Gel Silica glassesD. Jiang et. Al; Anal Chem. 2003, 75, 4578-84. sensor for hyaluronan and laminin (liver fibrosis markers) Livage et al; J. Phys.: Condens. Matter 2001, 13, R673-R691 - Sol-Gel glass H. C. Kim et. al., Nanoletters 2004, 7, 1169-1174 Photo
6、patterned Nanoporous MediaProteins, enzymes, antibodies, whole cells have been embedded within sol-gel glasses. They retain their bioactivity and remain accessible to external reagents. Sol-gel glasses are optically transparent, so it is possible to couple optics and bioactivity to make biosensors.
7、MatrixAntibodyIII. UV Lithography of Biological Substrates Why Lithography of Biological Substrates?1. Development of High Density Microarrays for DNA and Protein SensorsHigh throughput, Multianalyte Microarray Biochip SensorA. P. Blanchard, Genetic Engineering 1998, 20, 111-123L. Demers, Genetic En
8、gineering News 2003, 23, A. Spotting accomplished by ultrasharp pen tips as in AFMB. R. D. Piner et. al; Science 1999, 283, 661-663Current technology limits the size of each spot to 10-100 micronUV lithography promises spot size of 100 nm, i.e. 10,000 higher density UV Patterning on Biosubstrates Ex
9、amples: Development of monolithic biochips. Fabrication of Photonic Components like Waveguides and GratingsS. Huang et al; J. Micromech. Microeng. 2005, 15, 2235-2242A. Sharma et. al., Optics Letters 2005, 30, 501UV-activated Hydrophobic Hydrophilic Conversion: Fabrication of Micro/NanowellsA. Hozum
10、i et al; Langmuir. 2002, 18, 9022-9027 Fabrication of Bioelectronics & BioMEMSExamples: Fabrication of Microfluidic ChannelsFabrication of nano-gap electrodes: conduction properties of DNAJ. Lee et. al., MRS, 2002, pg. 185Microarray of Hydrophilic Wells on Polybutadiene thin- films using lithographi
11、c masksSpot Size: 100 m x 100 m DNA sensor chips involve immobilizing oligonucleotides on an array of hydrophilic wells separated by hydrophobic barriersPrevents cross-contamination Lithography on Polybutadiene thin-filmsEffect of UV: Makes Substrate HydrophilicHydrophilic Dye (Rhodamine 6G) sticks
12、to areas exposed to UVHydrophobic Substrate Mask: Opaque GridUVSputtered Gold attaches only to areas not exposed to UV Spot Size: 100 m x 100 m Gold-coated surfaces are widely used to immobilize biomolecules for sensing-related applications. A common technique involves an intermediate thiol self-ass
13、embled monolayer (SAM) on gold substrate. Gold provides a bio- inert shield against a substrate that could denature proteins. Lithography on Polybutadiene thin-filmsHydrophobic Substrate Mask: Opaque SquaresUVSputtered Gold Lithography on Poly-L-Lysine thin-filmsPolystyrene and Gold Micro/Nano spher
14、es stick to surface not exposed to UV300 nm 10 micron 300 nmPolystyreneGoldNanoporous substrates with controlled porosityHydrophilic Substrate Mask: Opaque GridUVPolystyrene/Gold SpheresLithography on Poly-L-Lysine thin-filmsPolystyrene Microspheres stick to surface not exposed to UV300 nm10 micronR
15、idged Hydrophilic WellsPolystyrene Wall Hydrophilic WellUVInterferometric (Maskless) UV LithographySpacing between Interference FringesUV = 244 nm = 45 deg = 170 nm UVUVInterferometric (Maskless) UV LithographyDone by Sequential Fabrication of Two Perpendicular GratingsMinimum Spot-Size in Array wit
16、h 244 nm UV: 200nm X 200 nm Fabrication of MicroarraysINTERFEROMETRIC UV LITHOGRAPHY OF POLYMER SUBSTRATESLithography on Polybutadiene thin-filmsDimension of wells: 500 nm x 500 nm x 30 nmGrating Period: 900 nmArray of NanowellsUV Lithography of Model Biomembrane (Phospholipid Bilayer) in Aqueous PhaseStack of Phospholipid BilayersExample: Bilayer of Phosphatidylc
