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1、本科毕业设计(论文)题目：纳米级 DLC 膜的力学性能研究院 （系）： 光电工程学院 专 业： 光电信息工程 班 级： 080111 学 生： 刘彬彬 学 号： 080111111 指导教师： 惠迎雪 2012 年 6 月I纳米级 DLC 膜的力学性能研究摘要类金刚石碳 (DLC) 膜，具有高硬度、高耐磨性、低摩擦系数、高热导率、高红外透过率、高化学稳定性等一系列与金刚石膜相似的优异性能。与金刚石膜相比，其具有沉积温度低、沉积面积大、膜面平整光滑、成本低等优点，是一种优良的红外增透保护材料。本文采用非平衡磁控溅射法在单晶硅基底上沉积制备非氢和含氢 DLC 薄膜，通过改变沉积时间以获取不同厚度的
2、薄膜样品，进而采用纳米压痕仪对薄膜样品的硬度进行测量，分析了薄膜制备工艺对薄膜力学性能的影响，并在此基础上对非氢和含氢 DLC 薄膜的力学性能进行了分析比较。研究结果表明：对于无氢 DLC 薄膜，保持其他工艺条件不变，薄膜的几何厚度会随着沉积时间近似成线性增长，但对于含氢的 DLC 薄膜，除了受到沉积时间的影响，甲烷气体流量比是影响薄膜厚度的重要因素；非氢 DLC 薄膜的硬度随着其厚度的增大而增高，而含氢 DLC 并未见相似规律，对于含氢 DLC 薄膜，其硬度明显受到反应气体流量的影响，随着 CH4：Ar 气体流量比的增加，薄膜的硬度逐渐减小，总体而言，非氢 DLC 薄膜的硬度要大于含氢 DL
3、C 薄膜的硬度。论文主要围绕 UMBS 技术沉积的非氢和含氢 DLC 薄膜力学性能展开研究，旨在为制备性能良好的非氢和含氢 DLC 薄膜提供实验依据。关键词：类金刚石(DLC) 薄膜；非平衡磁控溅射；力学性能；显微硬度IIMechanical Properties Of Nanoscale DLC FilmsAbstractDiamond-like carbon (DLC) film is an amorphous carbon film that exhibits a series of execellent properties such as high hardness,goodchem
4、ical inertness,high thermal conductivity,good transmittance in infrared and low wear coefficient.Compared with diamond film,DLC film has lower desposition temperature,larger deposition scale and smoother surface.It can be used as a new IR antireflective and protective material. Using unbalanced magn
5、etron sputtering deposition on a monocrystalline silicon substrate non-hydrogen and hydrogen-containing DLC films, by changing the deposition time to obtain film samples of different thickness, and then using the nanoindentation instrument measuring the hardness of the film samples, Analysis of thin
6、 film deposition process on the mechanical properties of films. On this basis, the mechanical properties of the non-hydrogen and hydrogen-containing DLC films were analyzed and compared. The results show that: For the hydrogen-free DLC films, Other conditions remain unchanged, the geometric thicknes
7、s of the films with deposition time is approximately linear growth. However, for hydrogen-containing DLC film, in addition to the deposition time affect the, methane gas flow ratio is an important factor affecting the film thickness; non-hydrogen DLC film hardness with the increase of its thickness
8、increased, hydrogen-containing DLC and no similar rules. For hydrogen-containing DLC films, its hardness is obvious by the reaction gas flow, With CH4: Ar gas flow ratio increases, the film hardness decreases gradually, Overall, The non-hydrogen DLC film hardness greater than the hydrogen of the har
9、dness of the DLC films.Papers around the UMBS non-hydrogen and hydrogen-containing DLC films deposited mechanical properties of a study, designed to provide the experimental basis forthe preparation of the good performance of non-hydrogen and hydrogen-containing DLC films.Keywords: Diamond-like carb
10、on (DLC) film; Unbalanced magnetron sputtering; Mechanical properties; Microhardness.III目 录摘要 .IAbstract .II第 1 章 绪论 .11.1 研究背景 .11.1.1 课题研究的意义 .11.1.2 国内外研究现状 .21.2 类金刚石的结构 .21.3 类金刚石的制备 .31.3.1 含氢与非氢 DLC 薄膜介绍 .31.3.2 物理气相沉积法（PVD） .41.3.3 化学气相沉积(CVD) .51.4 类金刚石的性能 8 .61.4.1 类金刚石的力学性能 .61.4.2 DLC 膜的光学性能 .61.4.3 DLC 薄膜的电学性能 .61.5 类金刚石薄膜的应用 .71.5.1 机械方面的应用 .71.5.2 DLC 在航天航空领域的应用 .71.5.3 类金刚石膜（DLC）在生物医学领域的应用 .71.5.4 类金刚石膜（DLC）在电子及微电子领域的应用 .81.5.5 类金刚石膜（DLC）在光学领域的应用 .81.5.6 类金刚石膜（DLC）在其他领域的
