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1、-1-NTU-IAM 12/23/02Recent Development of Bulk and Surface Acoustic Wave Technology for Frequency Control Applications S4J*&J*December 23, 2002Institute of Applied MechanicsNational Taiwan UniversityC.S. LamTXC Corporation-2-NTU-IAM 12/23/02What is a Wave?Bulk and Surface Acoustic Wave (BAW and SAW)B
2、AW Technology Applications in the Electronics IndustryRecent Development of BAW TechnologySAW Technology Applications in the Electronics IndustryRecent Development of SAW TechnologySome Interesting SAW Applications-3-NTU-IAM 12/23/02Definition of a WaveWebsters dictionary defines a wave as a disturb
3、ance or variation that transfers energy progressively from point to point in a medium and that may take the form of an elastic deformation or of a variation of pressure, electric or magnetic intensity, electric potential, or temperature. The most important part of this definition is that a wave is a
4、 disturbance or variation which travels through a medium. The medium through which the wave travels may experience some local oscillations as the wave passes, but the particles in the medium do not travel with the wave. Whats a Wave?-4-NTU-IAM 12/23/02BAW and SAW Applications in SeismologyBody Waves
5、 travel through the interior of the Earth.P, Primary, or Compressional waves travel the fastest (6 km/sec in the upper crust).S, Secondary, or Shear waves are somewhat slower (3.5 km/sec in the upper crust).Surface Waves travel along the Earths surface. Slower than body waves do the most damagesLove
6、 waves shake the ground side-to-side like an S wave. Rayleigh waves displace the ground like rolling ocean waves. The ground rolls forward and up and then down and backwards. -5-NTU-IAM 12/23/02BAW and SAW Applications in ElectronicsTij= cijklSklekijEkDi= eijkSjk+ ijEj-6-NTU-IAM 12/23/02Bulk Acousti
7、c Wave Technology J*Crystal (Resonator)Crystal Oscillator (w/ Crystal, ASIC, etc.)Tuning Forks-7-NTU-IAM 12/23/02Crystal and Crystal OscillatorBulk Acoustic Wave Vibration Modes -8-NTU-IAM 12/23/02Frequency vs Thickness for Infinite Platectnfn2=Fn resonance freq n odd integersc stiffness coefficient
8、 densityt thickness -9-NTU-IAM 12/23/02Round and Rectangular Quartz ResonatorsHC-49/U DIP-10-NTU-IAM 12/23/02Applications of Crystals and Crystal Oscillators in TaiwanTelecom Products *Network Products c*IT Products *Consumer Products le*-11-NTU-IAM 12/23/02XOTCXOMCXOOCXORbCsAbbre.10-5to 10-410-610-
9、8to 10-710-810-910-12to 10-11Accuracy (ppm)Computer timing, etc.Mobile phones, tactical radios, etc.Spread spectrum system clock, etc.Navigation system clock &frequency standard, radar, basestations, etc.Satellite terminals, radar, etc.Strategic equipment, EW, etc.Crystal oscillatorTemperature compe
10、nsated crystal oscillatorMicrocomputer compensated crystal oscillatorOven controlled crystal oscillatorSmall atomic frequency standardHigh performance atomic standardTypical ApplicationsOscillator TypeHierachy of Oscillators -12-NTU-IAM 12/23/02and Homo Sapien (Modern Man)Stop oscillationTCXO, OCXO,
11、 etc.Aging- long term stabilityJitter- short term instabilityPullabilityFrequency- sub-KHz to MHz and aboveInput- supply currentOther active/passive componentsPackageASICCrystal- pumps and regulates current flowVoltageCurrentCrystal Oscillator (XO)DeathPerson with more stable emotionsAging- long ter
12、m stabilityAnger- short term instabilityCan work long hours if neededFrequency- 1 Hz per 24 hoursInput- foodOther organsBodyBrainHeart- pumps and regulates blood flowBlood PressureBloodHomo Sapien (HS)Crystal Oscillator-13-NTU-IAM 12/23/02High Frequency Fundamental (HFF) Crystal Resonator100200 MHz
13、and higher-14-NTU-IAM 12/23/02No. Parameters Requirements1 Nominal frequency 60 MHz to 200 MHz2 Mode of vibration AT-Cut fundamental3 Package type SMD package (3.8mm * 3.8mm * 1.0mm)4 Load capacitance Series5 Drive level 100 uW max6 Frequency tolerance 30.0 ppm (at +253 deg C)7 Operating Temp. range
14、 0 to +85 deg C8 Resonance resistance 30 ohms max9 Motional capacitance(C1) TBD (4.0 fF to 7.0 fF )10 Re-flow soldering 5 ppm max (260 deg C peak)11 Frequency stability 15 ppm (Operating Temp. Range, Ref. 25 deg C)12 Frequency Discontinuities 2 ppm/deg C max (Frequency perturbation)13 Aging 10 ppm/2
15、0years (+253 deg C)Toyocom 20023.8mm x 3.8mm SMD HFF-15-NTU-IAM 12/23/02t*数fo 100200 MHz 58t*数挿&0 4.0 dB max帯97 1 dB-h55 fo10 kHz min.6666J6 1.0dB max.遅 10 usec max.(within fo10 kHz)20 dB min. (fo 50kHz)40 dB min. (fo100kHz)50 dB min. (fo200kHz)70 dB min. (fo900kHz)L66f6G5636f6, InputeOutput : 250 /-1.0pFAt 130 MHz t*数566変6554Fz囲-20 +70 2.5mm x 2.0mm SMD HFF MCFToyocom 2002-16-NTU-IAM 12/23/02FBAR with Polycrystalline AlN Film (Agilent)ElectrodeElectrodeSilicon SubstratePolycrystalline Al
