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1、TFT LCD Process andTFT LCD Process and Fab Design Fab Design What is TFT LCD What is TFT LCD Thin Film Transistor TFT Liquid Crystal Display LCD LCD applicationLCD application 1950s niche research Multi Billion industry today Application of TFT LCDApplication of TFT LCD MonitorNotebook PC TVOther ap
2、plication How TFT LCD worksHow TFT LCD works 彩色濾光片 上偏光片 下偏光片 背光源 TFT基板 液晶層 TFT Turn OFF TFT Turn ON 光源經液晶層 扭轉90 LCD Display TheoryLCD Display Theory Basic Components of TFT LCDBasic Components of TFT LCD 基本構造基本構造 l l 背光板背光板 BACK LIGHT BACK LIGHT l l 下偏光下偏光片片 DOWN POLARIZER DOWN POLARIZER l l 薄膜基板薄膜基
3、板 TFT SUBSTRATE TFT SUBSTRATE l l 液晶液晶 LIQUID CRYSTAL LIQUID CRYSTAL l l 彩色濾光片彩色濾光片 COLOR FILTER COLOR FILTER l l 上偏光上偏光片片 UP POLARIZER UP POLARIZER How color display worksHow color display works 紅 藍 綠 黃 白 紫 青 DATA DRIVER IC SCAN DRIVER ICTFT RGBRGB RGBRGB RGBRGB RGBRGB RGBRGB RGBRGB RGBRGB RGBRGB R
4、GBRGB RGBRGB TFT LCD ProcessTFT LCD Process TFT Array Thin Film Transistor LC Cell Liquid Crystal LCM Module Array 電晶體 矩形陣列 TFT基板生成 Cell 面板生成 Panel Module 產品模組 組裝 TFT LCD ProcessTFT LCD Process 薄膜 Thin Film 黃光 Photo Color Filter OK 蝕刻 Etch 測試 Array Test 基板投入 Substrate CELL TFT Process TFT ProcessTFT
5、 Process BOX 5 5道光罩道光罩 薄膜 黃光蝕刻 素玻璃 Glass Substrate TFT 基板 TFT ProcessTFT Process 鍍膜 sputter cvd 上光阻 coater 光罩 reticle 顯影 developer 顯影 液 對準 曝光 stepper 蝕刻 etch 去光阻液 stripper 去光阻 酸 氣體 鍍 下 一 層 膜 TFT Process 1 TFT Process 1 上光阻 coating 鍍第一層膜空白玻璃 酸 氣體 光罩 對準 曝光 stepping 顯影 液 顯影 developing 蝕刻 etching TFT Pr
6、ocess 2 TFT Process 2 顯 影 去光 阻液 去光阻 striping 鍍第二層膜 上光阻 對準 曝光 光罩 顯影 液 酸 氣體 蝕刻 TFT Process 3 TFT Process 3 去光 阻液 光阻剝離 鍍第三層膜 請依之前所 示範的方法 舉一反三 自 行模擬想像 CELL Process 1 CELL Process 1 TFT 基板 TFT Substrate 彩色濾光片 Color Filter CELL Process 2 CELL Process 2 PI 塗佈 PI Coating PI 塗佈 PI Coating 配向 Rubbing 配向 Rubbi
7、ng Spacer灑佈 Spacer Spray 框膠 Sealant Dispenser 點銀膠 Ag Dispenser 對位 Misalignment 熱壓 Hot press 切割裂片 Scribe Some manufacturers have LCM in different Fab TFT Process PlanTFT Process Plan CF Process PlanCF Process Plan Module Process PlanModule Process Plan A Fab Project includesA Fab Project includes C S
8、 A Civil Structure and Architecture MEP Mechanical Electrical and Plumbing Process Utility Systems UPW WWT Chemical Distribution Systems Bulk Specialty Gas Systems Clean Room System I E S M Space Management Utility Hook Up Typical Fab Design ProcessTypical Fab Design Process Integrating Design Proce
9、ssIntegrating Design Process Flat Panel Fab Design TeamFlat Panel Fab Design Team Flat Panel FactoryFlat Panel Factory Manufacturing Flow OptimizationManufacturing Flow Optimization Cleanroom Cost SavingCleanroom Cost Saving Determine Utility RequirementDetermine Utility Requirement Space Coordinati
10、onSpace Coordination Space ManagementSpace Management CleanroomCleanroom Cleanroom Air SystemCleanroom Air System Air Flow in CleanroomAir Flow in Cleanroom 3 80 3 26 2 71 2 17 1 63 1 08 0 54 0 Velocity m s Laminarity 10 Small vortices at the ceiling between FFU s Laminarity in main airstream 10 Lar
11、ge slow moving vortices between FFU s Partial Coverage Cleanroom Airflow without Diffusion Device Partial Coverage Cleanroom Airflow with Diffusion Device Building SectionBuilding Section Chilled Water System of a FABChilled Water System of a FAB Conventional LayoutConventional Layout New Fab LayoutNew Fab Layout
