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1、微图形转移技术光刻微型机电系统课程系列之三卢德江西安交通大学精密工程研究所Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU1 1Basic of PhotolithographyBasic of Photolithography2 2Mask FabricationMask Fabrication3 3Mask Align
2、erMask Aligner4 4Photolithography ProcessPhotolithography Process5 5Results JudgementResults Judgement微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTUUVUV曝光曝光显影显影后续加工后续加工微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU1 1Basic of PhotolithographyBasic of Photolithography2 2
3、Mask FabricationMask Fabrication3 3Mask AlignerMask Aligner4 4Photolithography ProcessPhotolithography Process5 5Results JudgementResults Judgement微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之四Institute
4、of Precision Engineering, XJTU1 1Basic of PhotolithographyBasic of Photolithography2 2Mask FabricationMask Fabrication3 3Mask AlignerMask Aligner4 4Photolithography ProcessPhotolithography Process5 5Results JudgementResults Judgement微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU光源光阑快门
5、掩模光刻胶层微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engine
6、ering, XJTUParallel lightMaskPhotoresistParallel lightMaskPhotoresist微图形转移技术光刻Contact Exposure ModesSoft contact (adjustable mechanical pressure) Hard contact(additional nitrogen pressure)Vacuum contact(evacuation of exposure gap)Soft vacuum (vacuum contact with additional nitrogen pressure)Mechanic
7、al pressureN2Mechanical pressureVacVacMechanical pressureMaskChuckMechanical pressureVacN2西安交通大学精密工程研究所西安交通大学精密工程研究所 Institute of Precision Engineering, Xian Jiaotong Institute of Precision Engineering, Xian Jiaotong UniversityUniversity微型机电系统课程系列之三微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Enginee
8、ring, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU1 1Basic of PhotolithographyBasic of Photolith
9、ography2 2Mask FabricationMask Fabrication3 3Mask AlignerMask Aligner4 4Photolithography ProcessPhotolithography Process5 5Results JudgementResults Judgement微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU基底清洗匀胶前烘曝光显影后烘烘干中烘漂洗微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微
10、图形转移技术光刻西安交通大学精密工程研究所西安交通大学精密工程研究所 Institute of Precision Engineering, Xian Jiaotong Institute of Precision Engineering, Xian Jiaotong UniversityUniversity微型机电系统课程系列之三微图形转移技术光刻010203040506005001000150020002500Speed (rpm)Resist Thickness (m)Medium Thicknesses of AZ4562: 30 s Spin TimeResults for poli
11、shed silicon, thickness depends on ambient humidityand surface preparation 西安交通大学精密工程研究所西安交通大学精密工程研究所 Institute of Precision Engineering, Xian Jiaotong Institute of Precision Engineering, Xian Jiaotong UniversityUniversity微型机电系统课程系列之三微图形转移技术光刻Very Thick Layers of AZ4562 in One Step:Acceleration 1 00
12、0 rpm/s020406080100120051015202530Spin Time (s)Resist Thickness (m)300 rpm400 rpm500 rpm 西安交通大学精密工程研究所西安交通大学精密工程研究所 Institute of Precision Engineering, Xian Jiaotong Institute of Precision Engineering, Xian Jiaotong UniversityUniversity微型机电系统课程系列之三微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineer
13、ing, XJTU1 1Basic of PhotolithographyBasic of Photolithography2 2Mask FabricationMask Fabrication3 3Mask AlignerMask Aligner4 4Photolithography ProcessPhotolithography Process5 5Result JudgementResult Judgement微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTU微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTUDose : HighDeveloper: LowDose : LowDeveloper: HighDose : MediumDeveloper: ModeratePRSubstrate微图形转移技术光刻微型机电系统课程系列之三Institute of Precision Engineering, XJTUThank you.微图形转移技术光刻
