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1、The“MARS”resonantMEMSmodulatorMARS (Membrane Anti-Reflection Switch) analog optical modulator l/4 Silicon Nitride “drumhead” suspended over a Silicon substrate 0 Vdrive 30V3l/4 gap l/2 inputl/4 SiNxSiliconPSGreflecttransmitVdrive 0 Vdrive 30V3l/4 gap l/2 inputl/4 SiNxSiliconPSGreflecttransmitVdriveV
2、oltage ResponsetheorymeasuredDrive voltage (V)Ford, Walker, Greywall & Goossen, IEEE J. Lightwave Tech. 16, 1998Greywall, Busch & Walker, Sensors & Actuators A A72, 1999.Goossen, Arney & Walker, IEEE Phot. Tech. Lett. 6, 1994第1页/共9页第一页，共10页。MARSequalizerdeviceMaterial: 200 nm Low-stress Silicon-rich
3、 nitride on 1150 nm PSG spacer Material: 200 nm Low-stress Silicon-rich nitride on 1150 nm PSG spacer Membrane dimensions: 300 um x 1500 um (8x8 mm chip)Membrane dimensions: 300 um x 1500 um (8x8 mm chip)Actuators: 40 chrome-gold electrode pairs on a 32 micron pitchActuators: 40 chrome-gold electrod
4、e pairs on a 32 micron pitchVoltageApplied silicon substratePSGelectrodes Optical WindowVoltageApplied Ford & Walker, IEEE Phot. Tech. Lett. 10, 1998Reflection loss: 2.0 dB 0V, 27 dB 30VMechanically continuous membrane with segmented actuator electrodes第2页/共9页第二页，共10页。Free-spaceWDMpackageFord, Walke
5、r, Goossen & Neilson, European Conf. On Optical Commun. 19993.7 dB loss, 0.1 dB PDL (incl. optical circulator)100 nm spectral range (5 mm active area)Custom achromatic lens (athermal lens & kovar mechanics)I/O Fiber(to circulator)Electrical I/OLens and l l/4f = 50mmMicromechanicalAttenuator ArrayGra
6、ting in tip/tilt mount600 lp/mm, 43o blaze angleGold-coated epoxy on Zerudur substrate第3页/共9页第三页，共10页。Wavelength (nm)ASE power (dB, relative to input)1520153015401550156015700-10-20-30-40-50Initial ASE (gain) spectraEqualized ASE (gain) spectraManualdynamicgainequalizationfilterFord & Walker, IEEE P
7、hot. Tech. Lett. 10, 1998; Ford, Walker, Goossen & Neilson, European Conference on Optical Communications 19991dB11dB6 dB uniform insertion loss, 0.1 dB PDL 0.1 ps polarization mode dispersion,0.5 ps/nm chromatic dispersion25 dB dynamic range over 40 nm spectrumPerformance:第4页/共9页第四页，共10页。Computer-C
8、ontrolledEqualizerPrototypeControl Algorithm Users program power setpoints Computer estimates drive voltages* Feedback from OSA refines settingsFord, Walker, Goossen & Neilson, European Conference on Optical Communications 1999Optical spectrum analyzerRack-mounted PC controllerDGEF & optical circula
9、torEqualizer response model: Membrane displacement estimated by adding Lorentzian-shaped features with crosscoupling; Optical response computed analytically.第5页/共9页第五页，共10页。 Original “MONET” amplifier 1st stage2nd stageInput power spectrum1525wavelength, nm0-10-20-30-40input power, dBm (schematic)-1
10、3 dBm/ch x 36 ch-18 dBm/ch x 36 ch1565-8 dBm/ch x 16 ch2 gain stageswith DCF port(7 dB fixed loss)Original amplifier design: 12 nm band & fixed input power 1 dB output power divergence1525wavelength, nm0-10-20-30-40input power, dBm (schematic)-13 dBm/ch x 36 ch-18 dBm/ch x 36 ch1565-13 dBm/ch x 36 c
11、hOriginal amplifier design: 12 nm band & fixed input power 1 dB output power divergenceExtended operation? Operating band to 30 nm Input power range by 15 dBOutput power spectrum1525wavelength, nm0-10-20-30-40input power, dBm (schematic)1565-18 dBm/ch x 36 ch-18 dBm/ch x 36 chOriginal amplifier desi
12、gn: 12 nm band & fixed input power 7 dB loss divergence15250-10-20-30-40input power, dBm (schematic)1565wavelength, nm-23 dBm/ch x 36 chConventionalErbiumfiberamplifier第6页/共9页第六页，共10页。Auto-equalized amplifier1st stage2nd stageDGEFPC controllerOSAtapInput power spectrum1525wavelength, nm0-10-20-30-40
13、input power, dBm (schematic)-13 dBm/ch x 36 ch-18 dBm/ch x 36 ch1565-13 dBm/ch x 36 chOriginal amplifier design: 12 nm band & fixed input power 1 dB output power divergenceExtended operation? Operating band to 30 nm Input power range by 15 dBAdd equalizer at DCF port Feedback output tap into OSA1525
14、wavelength, nm0-10-20-30-40input power, dBm (schematic)1565-18 dBm/ch x 36 ch-18 dBm/ch x 36 chOriginal amplifier design: 12 nm band & fixed input power 1 dB output power divergenceExtended operation: Operating band to 30 nm Input power range by 15 dBUsing equalizer at DCF port: 20 dB input power ra
15、nge 30 nm bandwidth15250-10-20-30-40input power, dBm (schematic)1565wavelength, nm-23 dBm/ch x 36 chAutomatically-equalizedEDFAAlgorithm convergence第7页/共9页第七页，共10页。MEMSdynamicgainequalizersnowinproductionalthoughnotatLucentortheirspinoffAgere!Note: Similar spectral equalizers except using Liquid Cry
16、stal attenuator arraysavailable from Corning, JDS Uniphase, OptoGone, Avanex第8页/共9页第八页，共10页。感谢您的欣赏(xnshng)！第9页/共9页第九页，共10页。内容(nirng)总结The “MARS” resonant MEMS modulator。(incl. optical circulator)。Lens and l/4。Rack-mounted PC controller。Original “MONET” amplifier。第8页/共9页。感谢您的欣赏(xnshng)。第9页/共9页第十页，共10页。
