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1、真空概念真空概念&机台专有机台专有名词导读名词导读李海波VacuumVacuum机台专用名词机台专用名词Air knifeAir knife:长片状出气孔的喷:长片状出气孔的喷 气除屑装置气除屑装置AshingAshing:光阻去除:光阻去除AngstromAngstrom:AlignmentAlignment:对准:对准ADIADI:显影后检查:显影后检查EDIEDI:蚀刻后检查:蚀刻后检查a-Sia-Si:非晶硅:非晶硅ActoneActone:丙酮:丙酮Air showerAir shower:空气洗尘室:空气洗尘室AssemblyAssembly:晶粒封装:晶粒封装Accelerati
2、on electrodes Acceleration electrodes 加速加速电极电极Aging Aging 老化老化Alloy Alloy 合金合金Alumina Alumina 铝土铝土Aluminum Flow Aluminum Flow 热流铝热流铝Aluminum Plug Aluminum Plug 铝插塞铝插塞Amorphous Silicon Amorphous Silicon 非晶硅非晶硅Anneal Anneal 回火回火Argon Argon 氩气氩气Argon instability Argon instability 氩气抽气不氩气抽气不稳定性稳定性Array
3、Array 阵列阵列A0VacuumVacuum机台专用名词机台专用名词Backing Pump Backing Pump 辅抽泵辅抽泵Barrier layer Barrier layer 阻障层阻障层Base Pressure Base Pressure 基准压力基准压力Binder Binder 粘合剂粘合剂Buffer Agent Buffer Agent 缓冲剂缓冲剂Barrier layerBarrier layer:阻障层:阻障层BrassBrass:黄铜管,用来提供设备的真空度,:黄铜管,用来提供设备的真空度,CDACDA,厂务氮气的,厂务氮气的非制程直接使用气体的传输非制程直
4、接使用气体的传输BDGBDG:保持剂,溶解:保持剂,溶解PRPR防止防止PRPR再附着,因强碱性的再附着,因强碱性的MEAMEA有机有机溶剂较难将剥离的溶剂较难将剥离的PRPR溶解,因此需加入保持剂溶解,因此需加入保持剂Breakdown voltageBreakdown voltage:崩溃电压:崩溃电压B.O.E. B.O.E. :缓冲蚀刻液:缓冲蚀刻液Burn InBurn In:预烧试验:预烧试验BINBIN:针测结果类别:针测结果类别Backstreaming Backstreaming 回流,逆流回流,逆流VacuumVacuum机台专用名词机台专用名词Capacitance ma
5、nometer Capacitance manometer 电容电容式测压计式测压计Cryo pump Cryo pump 冷冻邦浦冷冻邦浦Check Valve Check Valve 整流阀,防止气整流阀,防止气体在管路中回流体在管路中回流Chemical Vapor DepositionChemical Vapor Deposition:CVDCVD,化学气相沉积,化学气相沉积Clean Room Clean Room 洁净室洁净室Coating Coating 涂布涂布Combustible Gas Combustible Gas 易爆性气体易爆性气体Compressor Compre
6、ssor 压缩机压缩机Contact Plug Contact Plug 接触窗插塞接触窗插塞Cryogenic Pump Cryogenic Pump 低温泵低温泵Cryosorption Cryosorption 低温吸附低温吸附CACA:Cathode Cathode 阴极阴极Cathode dark space Cathode dark space 阴极暗区阴极暗区CDACDA:compressed dry air compressed dry air 压压缩的干燥空气缩的干燥空气CD biasCD bias:circuit dimension circuit dimension 蚀刻
7、完后线宽蚀刻完后线宽Cross SectionCross Section:横界面:横界面ContactContact:接触窗:接触窗ConcentrationConcentration:浓度:浓度CMOSCMOS:互补式金属氧化半导:互补式金属氧化半导体体CD measureCD measure:微距测量:微距测量Control LimitControl Limit:管制界限:管制界限CPCP:电路针测:电路针测Cycle timeCycle time:生产周期时间:生产周期时间Central MonitorCentral Monitor:设备中央:设备中央监控系统监控系统Condensati
8、on Condensation 冷凝冷凝crane: crane: 天车天车VacuumVacuum机台专用名词机台专用名词DC Magnetron Sputter DC Magnetron Sputter 磁控磁控DCDC溅镀机溅镀机Developer Developer 显影液显影液Development Development 显影显影Dry Etcher Dry Etcher 干蚀刻机干蚀刻机Wet Etcher Wet Etcher 湿蚀刻机湿蚀刻机Dummy LoadDummy Load:替代原设备的等效阻抗:替代原设备的等效阻抗DIWDIW:去离子水,纯水,阻抗达:去离子水,纯水
9、,阻抗达16M ohm16M ohmDesumDesum:电浆预处理:电浆预处理Defect densityDefect density:缺点密度:缺点密度DownDown:设备故障:设备故障DIPCDIPC:站点周期时间:站点周期时间Discharge valveDischarge valve:排气阀:排气阀DisplacerDisplacer:置换器:置换器Direction detection sensor Direction detection sensor 方向检测感应器方向检测感应器VacuumVacuum机台专用名词机台专用名词Exposure Exposure 曝光曝光Elli
10、psometer Ellipsometer 椭圆测量仪(椭圆测量仪(T, n)T, n)EpitaxyEpitaxy:磊晶:磊晶ExhaustExhaust:抽气装置:抽气装置ElectromigrateElectromigrate:电致迁移,因高电场流通下造成金:电致迁移,因高电场流通下造成金属原子沿材质本身边界向电子流方向移动造成断属原子沿材质本身边界向电子流方向移动造成断路。路。Electromigration resistanceElectromigration resistance:抗电移能力:抗电移能力ESDESD:静电放电:静电放电EDCEDC:工程资料分析系统:工程资料分析系统
11、Effective pumping speed Effective pumping speed 有效抽气速率有效抽气速率ELB Electric BreakerELB Electric BreakerEMO Emergency Mechanical Off SwitchEMO Emergency Mechanical Off SwitchVacuumVacuum机台专用名词机台专用名词Fab Fab 晶圆厂晶圆厂FTIR:Fourier Transform FTIR:Fourier Transform 红外线光谱仪,测量键结强度红外线光谱仪,测量键结强度Facility DownFacilit
12、y Down:公用系统故障:公用系统故障FacilityFacility:公用系统:公用系统FTFT:封装后测试:封装后测试Future HoldFuture Hold:预先扣留:预先扣留FAFA:工厂自动化系统:工厂自动化系统Forepump Forepump 前级邦浦前级邦浦Freeze drying Freeze drying 冷冻干燥冷冻干燥Filament Filament 灯丝灯丝VacuumVacuum机台专用名词机台专用名词Gate valveGate valve:闸阀:闸阀Gowning RoomGowning Room:更衣室:更衣室Gas flow Gas flow 气流
13、气流Gauge Gauge 真空计真空计 VacuumVacuum机台专用名词机台专用名词Hook UpHook Up:hardwarehardware连结,连结,gas&cable tray gas&cable tray 组立组立Homogeneous nucleationHomogeneous nucleation:均匀成核:均匀成核Heterogeneous nucleationHeterogeneous nucleation:非均匀成核:非均匀成核Hot alumiumHot alumium:热铝制程,在高于:热铝制程,在高于400400o oC C以上利用沉积铝在以上利用沉积铝在高温
14、下所具备的较佳的表面迁移的特性,使溅镀铝对晶高温下所具备的较佳的表面迁移的特性,使溅镀铝对晶片表面几何结构的阶梯覆盖能力提升的多重金属化制程片表面几何结构的阶梯覆盖能力提升的多重金属化制程方式。方式。HFHF:氢氟酸:氢氟酸HEPAHEPA:高效过滤器:高效过滤器HotHot:急件:急件Halogen lamp Halogen lamp 卤素灯卤素灯High vacuum High vacuum 高真空高真空Hot cathode Hot cathode 热阴极热阴极VacuumVacuum机台专用名词机台专用名词Inter lockInter lock:连锁装置:连锁装置ITOITO:透光导
15、电膜:透光导电膜 InO 90%+SnO 10% InO 90%+SnO 10% 烧结而成的靶材电极烧结而成的靶材电极IdleIdle:闲置:闲置InterbayInterbay:工程间搬运系统:工程间搬运系统IntrabayIntrabay:工程内搬运系统:工程内搬运系统 Ionization Ionization 电离电离Isolation valve Isolation valve 隔离阀隔离阀Ion voltage Ion voltage 离子加速电压离子加速电压Ion source Ion source 离子源离子源Ion desorption Ion desorption 离子逸出
16、离子逸出Ion detector Ion detector 离子侦测器离子侦测器Indium Indium 铟铟VacuumVacuum机台专用名词机台专用名词LDLD:loadingloadingLendLend:借机:借机Lot ID. Lot ID. :料号:料号Liquid nitrogen Liquid nitrogen 液态氮液态氮VacuumVacuum机台专用名词机台专用名词Mercury Probe Mercury Probe 水银测量仪,测临界电压水银测量仪,测临界电压MosMos:Metal-Oxide-SemiconductorMetal-Oxide-Semicondu
17、ctor,金属氧化半导体,金属氧化半导体MetallizationMetallization:金属化制程:金属化制程Multilevel interconnectsMultilevel interconnects:多重金属内连线,因在晶座上制造:多重金属内连线,因在晶座上制造两层以上的金属层而所需的导通方式两层以上的金属层而所需的导通方式Multilevel metallization processMultilevel metallization process:多层金属化制程:多层金属化制程MTBF:mean time between failureMTBF:mean time betwe
18、en failure,平均故障周期时间,平均故障周期时间MTTR:mean time to repairMTTR:mean time to repair,平均每次修复时间,平均每次修复时间MFCMFC:mass flow controllermass flow controller,质流控制器,质流控制器MEAMEA:剥离剂,剥除:剥离剂,剥除PRPR防止防止PRPR再附着再附着MonitorMonitor:例行测试:例行测试MergeMerge:分批:分批Medium vacuum Medium vacuum 中度真空中度真空Mechanical booster pump Mechanica
19、l booster pump 机械邦浦机械邦浦VacuumVacuum机台专用名词机台专用名词Operation movementOperation movement:站点转移量:站点转移量O-ring O-O-ring O-型环型环VacuumVacuum机台专用名词机台专用名词PassivationPassivation:保护层:保护层Physical Vapor DepositionPhysical Vapor Deposition:PVDPVD,物理气相沉积,物理气相沉积PhotolithographyPhotolithography:微影制程:微影制程Poly siliconPoly
20、 silicon:多晶硅,由多种:多晶硅,由多种不同结晶方向的单晶硅晶不同结晶方向的单晶硅晶粒所组成的纯硅物质粒所组成的纯硅物质Post bakePost bake:烘烤的预烤:烘烤的预烤Peeling ratePeeling rate:剥离速率:剥离速率PositivePositive:正片:正片PrimingPriming:涂底:涂底PilotPilot:试作:试作Polymer Polymer 聚合物聚合物Pumping speed Pumping speed 抽气速率抽气速率Pre-exposure bakePre-exposure bake:曝光前:曝光前的预烤的预烤Pilo val
21、vePilo valve:专门控制气体是:专门控制气体是否输入气动阀的开关否输入气动阀的开关Process gasProcess gas:制程气体:制程气体Pressure relief valvePressure relief valve:舒压:舒压阀,用于调节管件内压力阀,用于调节管件内压力PVCPVC:塑胶管:塑胶管PRPR:photo resist photo resist 光阻光阻PH3PH3:氢化磷:氢化磷Pass RoomPass Room:空气缓冲室:空气缓冲室Power ZonePower Zone:设备维修间:设备维修间PriorityPriority:派工级数:派工级数V
22、acuumVacuum机台专用名词机台专用名词ReliabilityReliability:可靠性:可靠性RushRush:快件:快件RouteRoute:生产涂程:生产涂程ReworkRework:重工:重工ReleaseRelease:解除:解除RecycleRecycle:内部回收:内部回收RecipeRecipe:制程分发:制程分发Radiation Radiation 辐射辐射Regeneration Regeneration 再生再生Rough vacuum Rough vacuum 粗略真空粗略真空VacuumVacuum机台专用名词机台专用名词Sputtering deposi
23、tionSputtering deposition:溅镀:溅镀SpikeSpike:尖峰,因硅对铝有一:尖峰,因硅对铝有一定的固态溶解度而造成的定的固态溶解度而造成的SuspectorSuspector:晶座:晶座SiHSiH4 4:silanesilaneSpin drySpin dry:水洗之后,旋转烘:水洗之后,旋转烘干的机台或是动作干的机台或是动作Stainless steelStainless steel:不锈钢管,:不锈钢管,用在与制程相关的制程气用在与制程相关的制程气体传输上体传输上StripperStripper:剥离剂:剥离剂SolventSolvent:溶剂:溶剂Sensi
24、tivity:Sensitivity:灵敏度灵敏度SupportingSupporting RoomRoom:生产支援室:生产支援室SPEC. LimitSPEC. Limit:规格界限:规格界限SPCSPC:statistic process control statistic process control 统计制程统计制程管制管制SWRSWR:特殊工程需求:特殊工程需求STBSTB:投片:投片ScrapScrap:报废:报废Stage movementStage movement:阶段转移量:阶段转移量SplitSplit:分批:分批SchedulingScheduling:生产排程系统
25、:生产排程系统StockerStocker:保管库:保管库VacuumVacuum机台专用名词机台专用名词TeflonTeflon管:替代不锈钢不便使用的制程液氮气体传输场合管:替代不锈钢不便使用的制程液氮气体传输场合TLVTLV:Threshold limit valueThreshold limit value,启时限值,启时限值silanesilane只需只需1.5ppm1.5ppm则则能爆炸能爆炸Trouble shootingTrouble shooting:故障排除:故障排除Turn RatioTurn Ratio:周转率:周转率Tour corridorTour corridor
26、:无尘室安全走道:无尘室安全走道ThroughoutThroughout:产速:产速TECNTECN:短期工程变更通知:短期工程变更通知TATTAT:累计生产时间:累计生产时间Thermal conductivity gauge Thermal conductivity gauge 热导真空计热导真空计Throughput Throughput 抽气量,排气量,气流通量抽气量,排气量,气流通量VacuumVacuum机台专用名词机台专用名词UPWUPW:超纯水,阻抗达:超纯水,阻抗达18M ohm18M ohmUniformityUniformity:(:(max-min)/(max+min)
27、 max-min)/(max+min) UtilizationUtilization:动用率:动用率Up-timeUp-time:可供利用的时间:可供利用的时间Ultrahigh vacuum Ultrahigh vacuum 超高真空超高真空VacuumVacuum机台专用名词机台专用名词Vacuum Vacuum 真空真空Vacuum stage Vacuum stage 真空级真空级Vacuum system Vacuum system 真空系统真空系统Valve Valve 阀门阀门 roughing roughing 粗抽阀粗抽阀 high vacuum high vacuum 高真
28、空阀高真空阀Vent Vent 破真空破真空VacuumVacuum机台专用名词机台专用名词WaiveWaive:规格外放行品:规格外放行品WaitWait:待修:待修WIPWIP:在制品:在制品WATWAT:晶片接受测试:晶片接受测试Window Window : 视窗视窗VacuumVacuum机台专用名词机台专用名词YieldYield:良率:良率VacuumVacuum机台专用名词机台专用名词Vacuum Class 粗略真空(粗略真空(rough vacuumrough vacuum) 760torr1torr 760torr1torr 中度真空中度真空(medium vacuum)
29、 (medium vacuum) 1torr10 1torr10-3-3torrtorr 高真空高真空 (high vacuum) (high vacuum) 10 10-3-3torr10torr10-7-7tor tor 超高真空超高真空 (ultra-high vacuum ) (ultra-high vacuum ) 10 10-7-7torrtorr以上以上 VacuumVacuum机台专用名词机台专用名词Parameter of Vacuum Pump l l所能達到之最低的壓力所能達到之最低的壓力所能達到之最低的壓力所能達到之最低的壓力 其大小有邦浦本身氣體逆流的大小或所用抽气媒
30、體的其大小有邦浦本身氣體逆流的大小或所用抽气媒體的 蒸汽壓大小來決定。蒸汽壓大小來決定。l l有效之工作壓力範圍有效之工作壓力範圍有效之工作壓力範圍有效之工作壓力範圍 指在此壓力範圍内,邦浦有足夠的抽气速率。指在此壓力範圍内,邦浦有足夠的抽气速率。l l抽气速率大小抽气速率大小抽气速率大小抽气速率大小 邦浦的抽气速率隨壓力而改變,並非定值。邦浦的抽气速率隨壓力而改變,並非定值。l l排氣口壓力排氣口壓力排氣口壓力排氣口壓力 主要針對排氣式邦浦而言,排氣口壓力不為一大氣主要針對排氣式邦浦而言,排氣口壓力不為一大氣 壓的邦浦必須使用輔助邦浦(或前级邦浦)组合工壓的邦浦必須使用輔助邦浦(或前级邦浦)
31、组合工 作以达到抽气目的作以达到抽气目的。 VacuumVacuum机台专用名词机台专用名词Function of Vacuum Systemn nExhaustn nRough Vacuum 10 torrRough Vacuum 10 torrn nHigh Vacuum 10 torrHigh Vacuum 10 torrn nVentn nSlow Vent (NSlow Vent (N2 2) )n nNormal Vent (CDA)Normal Vent (CDA)n nProcess Gas In(Ar,O2 2,N2 2,H2 20)n nFlush(通入N2,再抽出带走pa
32、rticle)-7-3VacuumVacuum机台专用名词机台专用名词Pump Unitsn nDry Pump (2 units): Roughing Pumpsn nSystem pump:iF1800System pump:iF1800n nLoad/Lock pump:diF600KDDLoad/Lock pump:diF600KDDn nCryo Pump (6 units): High Vacuum Pumpsn nCP1,2(U8HSP,C30V):L/chCP1,2(U8HSP,C30V):L/chn nCP01,02(U12HSPL,C30MV):T0/chCP01,02(U
33、12HSPL,C30MV):T0/chn nCP3,4(U16HSPL,C31MV):S/chCP3,4(U16HSPL,C31MV):S/chVacuumVacuum机台专用名词机台专用名词Vacuum Gaugen nPIG (Pirani Indication Gauge)n nIG (Iron Gauge)n nDG (Balatron Vacuum Gauge)n nColor IndicationsATM PIG High PIG Low IG High IG LowVacuumVacuum机台专用名词机台专用名词真空计之作用n n有離子真空計和Pirani真空計n n離子真空計利
34、用系統中之氣體分子踫撞並且將游離,正離子被集極收集,其所造成之電流大小與分子數目多少,既系統壓力成比例關係,由電流之量測以作壓力之指示。 n n Pirani真空計利用熱電偶電阻值的改變以量測壓力 VacuumVacuum机台专用名词机台专用名词 Exhaust principleVacuum chamberCompressorunitRPIGPiG2PS2PiG1MVMBPS1v1v2N2N2v4Helium gas flowCooling waterCryo-uRBHRV2RV3RV1v3PRN2VacuumVacuum机台专用名词机台专用名词1.第一級冷凝500K800K 水氣與二氧化碳
35、。2.第二級冷凝10200K 氮氣、氧氣、氬氣。3.活性炭吸附級 氫氣、氦氣、氖氣。Cryo PumpVacuumVacuum机台专用名词机台专用名词Cryo Pump Gas FlowGasHe. Low TempHe. High TempCooling WaterFirst CondensationSecond CondensationGasWater inWater outCompressorOil filterAbsorberVacuumVacuum机台专用名词机台专用名词Regeneration of the Cryo pumpStart up rege.Close main valveShut off cryopumpBand heater onIntroduce dry N2Atm pressurePurge dry N2Complete warm upStop dry N2yesyesnonoRough pump the cryopumpComplete rough pumpBand heater offnoyesStart up cryopumpComplete cool downComplete rege.noyesVacuumVacuum机台专用名词机台专用名词Exhaust system unitsVacuumVacuum机台专用名词机台专用名词