《等离子体浸没离子注入与沉积合成碳化钛薄膜的摩擦磨损性能研究.docx》由会员分享，可在线阅读，更多相关《等离子体浸没离子注入与沉积合成碳化钛薄膜的摩擦磨损性能研究.docx（8页珍藏版）》请在金锄头文库上搜索。
1、等离子体浸没离子注入与沉积合成碳化钛薄膜的摩擦磨损性能研究Abstract:In this study, plasma immersion ion implantation and deposition (PIIID) technology was used to synthesize titanium carbide (TiC) films on a steel substrate. The friction and wear performance of the TiC films was investigated by a reciprocating friction and wear
2、tester. The results showed that the TiC films had better wear resistance than the substrate. The surface morphology of the TiC films was observed by scanning electron microscopy (SEM) and the structure and composition of the films were analyzed by X-ray diffraction (XRD) and Raman spectroscopy. The
3、results indicated that the TiC films were compact and uniform, and the preferred crystal orientation was (111). The TiC films were composed of TiC and C phases, and the content of TiC phase was higher. The main factors affecting the wear resistance of the TiC films were analyzed, including film thic
4、kness, microhardness, surface roughness and surface adhesion. Finally, the mechanism of wear resistance of TiC films was discussed.Introduction:Titanium carbide (TiC) is a hard and wear-resistant material with good oxidation resistance, high melting point, low coefficient of thermal expansion, and h
5、igh electrical conductivity. It has been widely used in cutting tools, wear-resistant coatings, and composite materials. Therefore, the synthesis of TiC films has attracted much attention in the field of material science. Plasma immersion ion implantation and deposition (PIIID) technology is a new s
6、urface modification technology that combines ion implantation and deposition processes. It has advantages of high deposition rate, low temperature, and precise control of film composition and structure, and has been used to synthesize various functional films.In this study, TiC films were synthesize
7、d on a steel substrate by PIIID technology using methane gas as the carbon source. The friction and wear behavior of the TiC films was investigated and the factors affecting the wear resistance were analyzed. The purpose of this research was to explore the potential application of TiC films in the f
8、ield of wear-resistant coatings.Experimental Details:The substrate material used in this study was Q235 steel with a dimension of 40 mm 10 mm 2 mm. The steel substrate was polished with abrasive paper and cleaned with acetone and ethanol before deposition. The TiC films were deposited on the steel s
9、ubstrate by PIIID technology using a pulsed DC power supply. The methane gas flow rate was 60 sccm, the bias voltage was -500 V, and the deposition time was 1 hour. The substrate temperature during deposition was kept at 350 C. The thickness of the TiC films was measured by a surface profilometer. T
10、he surface morphology of the TiC films was observed by scanning electron microscopy (SEM). The structure and composition of the films were analyzed by X-ray diffraction (XRD) and Raman spectroscopy. The friction and wear tests were carried out on a reciprocating friction and wear tester (MM-2000). T
11、he wear track was measured by a surface profilometer. Results and Discussion:The TiC films deposited by PIIID technology were uniform and dense, with a thickness of about 2 m. The surface of the TiC films was smooth without cracks or defects, as shown in Fig. 1. The XRD pattern of the TiC films is s
12、hown in Fig. 2. It can be seen that the TiC films had a preferred crystal orientation of (111). The Raman spectrum of the TiC films is shown in Fig. 3. The peaks at 1420 cm-1 and 1535 cm-1 were assigned to the D and G bands of the carbon phase, respectively. The peak at 636 cm-1 was assigned to the
13、TiC phase. The TiC films were composed of TiC and carbon phases, and the content of TiC phase was higher.The friction and wear test results of the TiC films are shown in Fig. 4. The friction coefficient of the TiC films was stable at about 0.4, while the friction coefficient of the substrate increas
14、ed rapidly after a short running-in period. The wear rate of the TiC films was about 0.001 mg/m, while the wear rate of the substrate was about 0.08 mg/m. The TiC films had better wear resistance than the substrate.The surface morphology of the wear track of the TiC films was observed by SEM, as sho
15、wn in Fig. 5. It can be seen that there were no obvious cracks or delamination on the surface of the TiC films, and the wear mechanism was mainly adhesive wear. The wear debris on the surface of the TiC films were small and uniform, indicating that the TiC films had good wear resistance.The factors
16、affecting the wear resistance of the TiC films were analyzed, including film thickness, microhardness, surface roughness, and surface adhesion. The thickness of the TiC films directly affects the wear resistance. The TiC films with a thickness of about 2 m in this study had good wear resistance. The microhardness of the TiC films was measured by a nanoindentation tester, and the average value was about 24 GPa, much higher than that of the
