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1、中文 4564 字出处：第七届亚洲气溶胶会议论文集. 2011附录英文文献翻译An Experiment on Energy Reduction of an Exhaust Air HeatRecovery Type Outdoor Air Conditioning System forSemiconductor Manufacturing Clean RoomsKyung-Hoon Yoo 1 , Gen-Soo Song 1 , Hyung-Tae Kim 1 , Seung-Woo Son 2 and Dug-Jun Park 31 Nanoscale Contamination Con
2、trol Laboratory, Korea Institute of Industrial Technology(KITECH), 1271-18, Sa-1-dong, Ansan-si, 426-171, Gyeonggi-do, South Korea2 Sunglim PS Co., 1301, Namseong Plaza, 345-30, Gasan-dong, Geumcheon-gu, Seoul, 153-8023 Shinsung ENG Co., 404-1, Baekhyeon-dong, Bundang-gu, Seongnam-si, 463-420ABSTRAC
3、TIn recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor air conditioning system represents about 45 % of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy
4、 conservation point of view, heat recovery from the exhaust air is therefore usefulfor reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air wa
5、sher to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a pre-heater, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was sh
6、own from the lab-scale experiment with outdoor air flow of 1,000 m3/h that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.KEYWORDS: Semiconductor Manufacturing Clean Room, Outdoor AirConditioning Sys
7、tem, Air Washer,Heat Recovery, Energy Reduction.IntroductionFor recent semiconductor manufacturing clean rooms, the energy consumption of an outdoor air conditioning (hereafter OAC) system represents about 45 % of the total air conditioning load required to maintain a clean room environment 1,2 . In
8、 addition, there is a large quantity of exhaust air from a clean room, leading to the consequent large amount of waste heat. From an energy saving point of view, heat recovery from the exhaust air is therefore helpful for reducing the outdoor air conditioning load for a clean room. Recently , air wa
9、shers have been sometimes used in OAC systems for semiconductor manufacturing clean rooms to control humidity and simultaneously remove suspended dusts and gaseous contaminants such as NH 3 , SOx, NOx and organic gases in incoming outdoor air, as shown in Figure 1. Meanwhile, since the exhaust air c
10、arries chemically toxic gaseous matter, a wet scrubber has to be used to handle it before it is discharged to the atmosphere. In the wet scrubber the heat transfer between the exhaust air and the scrubbing water always takes place. The transferred heat deserves utilizing to heat or cool the incoming
11、 outdoor air, which needs to be contacted indirectly with the scrubbing water because of protection from contamination.Figure 1. Schematic diagram of the proposed energy efficient outdoor airconditioning system with an air washer of heat recovery function.So far only a few studies regarding the air
12、washer with the heat recovery function for semiconductor clean rooms have been conducted by Fujisawa et al. 3,4 , Shiroma et al. 5 and Yamamoto et al. 6 . None of the above mentioned publications seems to have been described sufficiently in detail to allow the understanding of the overall energy con
13、sumption and saving performance of the OAC system. They focused only on heat recovery equipment, not on the OAC system itself. Therefore the effect of air conditioning process constraints such as supply air condition and the combination with heating/cooling coils on the energy saving performance of
14、an energy-efficient OAC system design needs to be taken into account. In the present work, an energy-efficient OAC system was proposed to reduce the outdoor air conditioning load by utilizing the air washer with heat recovery function based on the previous work by Fujisawa et al. 3,4 and Yamamoto et
15、 al. 6 . The proposed OAC system consisted mainly of air filters, a pre- heater, an air washer, two stage cooling coils, a reheating coil, a humidifier, and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber, as shown in Figure 2. An experiment was carried o
16、ut on the lab-scale with an air flow of 1000 m3/h regarding energy consumption and saving of the proposed energy-efficient OAC system compared with the OAC system with a simple air washer.Experimental MethodsFigure 2. Schematic diagram of the present experimental apparatus for the energy-efficient outdoor air conditioning system with heat recovery function.Figure 2 shows the schematic diagram of the overall experimental apparatus for
