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1、基于CMOS工艺SPAD的单光子探测技术研究重庆大学硕士学位论文(学术学位)学生姓名：闫旭亮指导教师：孟丽娅 副教授专 业：仪器科学与技术学科门类：工 学重庆大学光电工程学院二O一五年五月中央高校科研基本业务费资助项目(CDJZR12120001)Study on single-photon detector Based on CMOS Technology Single-Photon Avalanche DiodeA Thesis Submitted to Chongqing UniversityIn Partial Fulfillment of the Requirement for th
2、eMasters Degree of EngineeringByYan XuliangSupervised by Associate Prof. Meng Liya Specialty: Instrument Science and TechnologyCollege of Optoelectronic Engineering of ChongqingUniversity, Chongqing, ChinaMay, 2015Supported by CDJZR(No.12120001)中文摘要摘 要光在极其微弱时会离散成一个个的光子，称为单光子。单光子信号由于强度微弱且粒子性显著，常规技术难以
3、对其检测，被认为是光电探测技术的极限。同时单光子信号又是一种普遍存在的信息载体，在日常生活、工业生产、科学研究以及国防军事等各方面都有着广泛应用，因而近年来受到研究人员重视。单光子探测技术主要体现在以下几方面：有极高增益的单光子探测器件，控制单光子探测器件并对信号进行处理的快速电路，器件和电路的集成技术，大规模像元阵列的制作及拼接。目前在单光子探测方面亟待解决的问题有：单光子探测器工艺复杂、工作电压高、价格昂贵、重复性差，外围电路响应速度慢、版图面积大，对单光子探测器和相关电路的混合拼接易导致性能下降、噪声变大。为解决上述问题，本文在中央高校基本业务费资助项目(NO.12120001)支持下，
4、对单光子探测技术进行了研究。文章选用实验室设计的带保护环结构的CMOS工艺兼容的雪崩光电二极管作为单光子探测器件，对雪崩光电二极管的工作原理和相关参数进行了介绍。用等效电路模型代替雪崩光电二极管在软件中进行仿真，分析比较了雪崩光电二极管的三种淬灭模式，选择主动淬灭电路控制雪崩光电二极管，用高速电压比较电路作为雪崩信号甄别电路，设计了数字和模拟结构的计数电路。在此基础上完成了单光子探测像元电路，包括雪崩光电二极管等效电路、淬灭复位电路、雪崩信号甄别电路、光子计数电路等。仿真结果显示电路探测速度可达5ns，淬灭电路死时间约2.690ns，从光子信号进入到计数完成整体电路传输延时约3.0572ns，
5、计数电路在线性模式下的计数容量为55。此外，还对时间相关单光子计数的原理和基本电路结构进行介绍，用高速电压比较电路进行光子到达定时，阐述几种时间数字转化技术，设计了基于S-R锁存器的时间放大电路和基于电流偏置比例的时间放大电路。关键词：单光子探测，雪崩光电二极管，光子计数，时间相关单光子计数 I英文摘要ABSTRACTOptical signals will disperse into photons when it is extremely weak，be called as single-photon signalAs its weak intensity and significant
6、particles，Single-photon is hard to detect by conventional means testing and considered to be the limit of the photoelectric detection technologyBut，single-photon as a kind of widespread information carrier has been highly regard and widely applied in the daily life，industrial production，scientific r
7、esearch and military areasSingle-photon detection technology is mainly manifested in the following respects： single photon detector with a very high gain，extremely fast circuits to control the single-photon detector and processing single，integration of devices and circuits ，accomplishing large-scale
8、 arrayThere are a series of problems to be solved in practical applicationThe characteristic of single-photon detector is poor in technology，working voltage，price，repeatabilityCircuits work slow and take much layoutThe hybird integration of devices and circuits easily lead to performance degradation
9、 and noise enhancementThis article with support of the central colleges and universities scientific research basic business finding researched single-photon detection technology to solve the above problemsThe paper put forward to use CMOS technology avalanche photodiode with protection ring as singl
10、e-photon detector and introduced its working principle and characteristic parametersThe paper used the equivalent circuit model instead of avalanche photodiode in the circuit simulation，compared three kinds of quenching model and selected active quenching circuit controlling avalanche photodiode，des
11、igned high speed voltage comparsion circuit screening avalanche signal，planned two counting circuitAs an important work，we constructed an complete pixel circuit，including the equivalent circuit of avalanche photodiode，the quenching and resetting circuit, avalanche signal discrimination circuit，photo
12、n counting circuit，etcThe simulation results show that the minimum detection time is 5ns，dead time of quenching circuit is approximately 2.690 ns，the time from photon into detector to accomplish counting last 3.0572 ns，counting in linear mode range from 0 to55In addition，paper introduced the princip
13、le and circuit structure of time correlated single photon counting，applied voltage comparator defining time of photon arriving，stated several typical kinds of time to digital converter，designed two types time amplifier circuit based on S-R lanch and current bias ratioKeywords: single-photon detector
14、，avalanche photodiode，photon counting，TCSPC61目 录目 录中文摘要I英文摘要III1 绪论11.1 引言11.2 单光子探测技术11.3 国内外研究现状41.4 课题主要工作和内容安排62 单光子探测技术的基本理论与方法72.1 SPAD介绍72.1.1 SPAD工作原理72.1.2 SPAD主要参数82.1.3 SPAD工艺与结构92.2 SPAD等效电路模型1222.2.1 简单SPAD等效电路132.2.2 SPAD SPICE仿真模型142.3 SPAD淬灭方式172.3.1 被动淬灭172.3.2 主动淬灭202.3.3 门控脉冲淬灭212
15、.4 小结223 单光子探测电路设计233.1 整体电路结构233.2 淬灭电路设计及仿真233.2.1 淬灭电路基本结构233.2.2 延时电路263.2.3 淬灭-复位电路283.3 信号甄别303.4 计数电路333.4.1 数字计数电路333.4.2 模拟计数电路353.5 单光子探测计数电路393.6 小结414 时间相关单光子计数434.1 基本理论434.2 时间数字转换(TDC)444.2.1 计数器型TDC444.2.2 基于电容的TDC454.2.3 基于延时单元的TDC454.3 时间放大464.3.1 基于SR锁存器的TA464.3.2 基于电流偏置比例的TA494.4 小结515 论文总结53致 谢55参考文献57附 录61A. 作者在攻读硕士学位期间发表的论文目录611 绪论1 绪论1.1 引言21世纪是信息社会，信息的获取、传输、处理至关重要，人类主要通过视觉、听觉、嗅
