The Leader in Dynamic InterferometryInterferometry4D Technology CorporationCompany Profile4D 动态相移干涉仪动态相移干涉仪 （（Dynamic Interferometer) -----原理、技术与应用原理、技术与应用Oct. 2010 www.OPT The Leader in Dynamic InterferometryInterferometryConfidential主要内容主要内容•相移干涉技术的原理相移干涉技术的原理•动态相移干涉仪原理动态相移干涉仪原理•4D PhaseCam 动态干涉仪动态干涉仪•动态干涉仪的应用动态干涉仪的应用 The Leader in Dynamic InterferometryInterferometryConfidential2.1 相移干涉技术的原理相移干涉技术的原理 续续I1(x,y) = I0 + I' cos [ f f (x,y)] f f (c1) = 0 (0°)I2(x,y) = I0 - I' sin [f f (x,y) ] f f (c2) = p p/2 (90°)I3(x,y) = I0 - I' cos [f f (x,y) ] f f (c3) = p p (180°)I4(x,y) = I0 + I' sin [f f (x,y) ] f f (c4) = 3p p/2 (270°)I(x,y) = I0 + I' cos[f(x,y)+ f(c)]4j j (x, y)pHeight (x, y) = l对同一表面，采多幅不同相位的干涉图，对同一表面，采多幅不同相位的干涉图，进行计算，获得表面的数值进行计算，获得表面的数值 The Leader in Dynamic InterferometryInterferometryConfidential2.2 相移干涉技术的原理相移干涉技术的原理 －普通干涉仪普通干涉仪准直镜准直镜参考面参考面被测面被测面分束器分束器激光激光Camera光阑光阑 The Leader in Dynamic InterferometryInterferometryConfidential2.2 相移干涉技术的原理相移干涉技术的原理 －普通干涉仪普通干涉仪 续续 f(f(c)= f(f(t), 按时间顺序，人为改变干涉图的相位按时间顺序，人为改变干涉图的相位f (0.03s) = 0 degf (0.06s) = 90degf (0.09s) = 180degf (0.12s) = 270degTestPartRefFlatTestPartRefFlatTestPartRefFlatTestPartRefFlatPZTPZTPZTPZT The Leader in Dynamic InterferometryInterferometryConfidential2.3 相移干涉技术的原理相移干涉技术的原理 －振动的影响振动的影响•CCD的帧频(30帧/秒），导致普通相移干涉测量时间>120ms•能不能用一帧干涉图就完成测量？ The Leader in Dynamic InterferometryInterferometryConfidential(2x,2y)(2x+1,2y)(2x,2y+1)(2x+1,2y+1)Intensity PatternOn the DetectorSensorArray4 Frame PSI:ADBC3.1 4D 动态干涉仪原理动态干涉仪原理•所有相位图都在同一时刻获得 ! The Leader in Dynamic InterferometryInterferometryConfidentialtestrefRHCLHC圆偏光圆偏光 (DfDf) + 线偏振器线偏振器 (a a) cos (DfDf + 2a a) 1 与光轴平行的分量才能发生干涉与光轴平行的分量才能发生干涉2 偏振器的光轴角度决定了偏振器的光轴角度决定了 相移结果相移结果使用偏振光的相移机理使用偏振光的相移机理3.2 4D 动态干涉仪原理动态干涉仪原理 续续 －相位相关探测器－相位相关探测器Kothiyal and Delsile, Appl. Opt. V24 n24 p4439 (1985) Kemo, et. al, Appl Opt. V41 n 13 p2448 (2002) The Leader in Dynamic InterferometryInterferometryConfidential定向微偏振器阵列定向微偏振器阵列3.2 4D 动态干涉仪原理动态干涉仪原理 续续 －相位相关探测器－相位相关探测器•相位相关探测器相位相关探测器 The Leader in Dynamic InterferometryInterferometryConfidential4.1.1 PhaseCam泰曼－格林系列泰曼－格林系列 The Leader in Dynamic InterferometryInterferometryConfidential4.1.2 PhaseCam产品线产品线•P4000>>P4010>>P4020 P5030 P6000•基于泰曼型的多波长、高能、基于泰曼型的多波长、高能、ESPI、便携型、便携型•品种最多，发展最完善，品种最多，发展最完善，用户最多，最稳定用户最多，最稳定 The Leader in Dynamic InterferometryInterferometryConfidential 4D 产品产品 系列系列•FizCam–斐索型干涉仪–4“ －32” –倾斜光束1000系列–共光路 2000系列 •PhaseCam–泰曼－格林型干涉仪–多波长–ESPI电子散斑–适用于大口径长光程凹面的测量•160x160x85mm•NIR/IR 干涉仪干涉仪•193nm 干涉仪干涉仪Patent No. US 7,057,738Patent No. US 6,304,330•PC6000 The Leader in Dynamic InterferometryInterferometryConfidential•8/30/2024•4DTechnology Corporation•39Award Winning Technology•10 US Patents (licensed or owned), numerous pending•2003 Photonics Circle of Excellence Winner: One of the best 25 new products of the year•2004 R&D 100 Award for FizCam•2005 R&D 100 Award for PhaseCam MW•2006 NASA Goddard SFC Exceptional Achievement Award for SpeckleCam (ESPI System)•2006 R&D 100 Award for SpeckleCam (ESPI System) The Leader in Dynamic InterferometryInterferometryConfidentialPhaseCam 6000 Configuration8/30/202440 The Leader in Dynamic InterferometryInterferometryConfidentialFeatures - Specifications•Small form factor•Fully automated, remotely controllable•Interchangeable sources•Larger beam diameter – 9mm•Entrance pupil plane 50mm in front of system •1MPix camera, fixed magnification•532 or 632.8nm single mode, long coherence sources8/30/202441 Extended Precision Package for PhaseCam6000 The Leader in Dynamic InterferometryInterferometryConfidentialPhaseCam 6000Extended Precision PackageArtifacts virtually eliminated Artifacts from dust, diverger optics, etc.Extended Precision PackageStandard Illumination Source The Leader in Dynamic InterferometryInterferometryConfidentialQuantitative ImprovementPV ~28nmPV <5nm“Bulls-eye” artifacts are highly attenuated in measurement The Leader in Dynamic InterferometryInterferometryConfidentialPerformance Improvement vs. Spatial FrequencyRMS Precision (Waves @ 633nm)Spatial Frequency (Cycles/Aperture)SourceAllLow (<30)Mid (30-100)High (>100)Point0.000670.000340.000140.00042Extended0.000340.000260.000060.00010Factor of two Improvement!Factor of four improvement at higher spatial frequencies! The Leader in Dynamic InterferometryInterferometryConfidential 6. 动态干涉仪的应用动态干涉仪的应用•适合于适合于 恶劣环境下的测量恶劣环境下的测量–快速测量快速测量 – 测量速度受曝光时间限制，而不受CCD帧频限制!–对振动不敏感对振动不敏感–减少了气流的影响减少了气流的影响－多次平均•适合于适合于 挑战性的测试设置挑战性的测试设置–大口径光学元件或系统 –长光程–真空或环境仓内的测试•适合于适合于 高难度测试高难度测试–运动表面–多波长干涉仪－JWST–电子散斑干涉仪ESPI－NASA–生产环境下的测试 The Leader in Dynamic InterferometryInterferometryConfidential重要项目中的应用•NASA于2005年1月发射的“深度撞击飞行器” 7月4日成功撞击坦普尔1号彗星 携带的所有光学系统由4D PhaseCam做质量检测QC. The Leader in Dynamic InterferometryInterferometryConfidential多次反射测量多次反射测量经过镜面多次反射后光强变得很弱增大了动态测量的难度 The Leader in Dynamic InterferometryInterferometryConfidential长焦距离轴非球面的测量长焦距离轴非球面的测量 The Leader in Dynamic InterferometryInterferometryConfidential长光程测量中的气流场长光程测量中的气流场32m 光程光程, F F 1.2m8/30/2024 The Leader in Dynamic InterferometryInterferometryConfidential表面残差表面残差 PVq=89nm：：去除去除zernike项后项后8/30/2024 The Leader in Dynamic InterferometryInterferometryConfidential•口径口径0.8m，，500次测量平均消除气流影响次测量平均消除气流影响加工现场检测加工现场检测 The Leader in Dynamic InterferometryInterferometryConfidential气流的均化与抑止气流的均化与抑止 Confocal test of 3m radius, 300mm diameter spherical mirror - 0.0008 l l rms 1s s repeatability, 5 averages of 25 measurements The Leader in Dynamic InterferometryInterferometryConfidential 轻质复合镜：半径20m, 口径0.5m振动环境 The Leader in Dynamic InterferometryInterferometryConfidential环境仓内的低温测试环境仓内的低温测试Figure testing of 300 mm Zerodur mirrors at cryogenic temperatures, Baer & Lotz, SPIE 4822-4 July 2002 The Leader in Dynamic InterferometryInterferometryConfidential超音速冲击波超音速冲击波 The Leader in Dynamic InterferometryInterferometryConfidential强激光的热过程强激光的热过程 The Leader in Dynamic InterferometryInterferometryConfidential4D动态干涉仪动态干涉仪 小结小结•泰曼－格林型泰曼－格林型PhaseCam P4020：： P5030：光学变倍：光学变倍 P6000 IR/NIR •共光路菲索型共光路菲索型 F2000：短相干光源：短相干光源 F3000：：He-Ne长相干光源长相干光源•其它：其它： WaveCam ESPI 多波长干涉仪多波长干涉仪… The Leader in Dynamic InterferometryInterferometryConfidential谢谢 谢谢 。