Tribological Properties for the Key Technology of Metal Surface Texturing by Using Photolithography随着纳米超精密加工技术的不断发展，出现了一种在金属表面上制成微/纳米表面图形, 降低润滑状态下的机械零部件的摩擦力、提高耐磨性以及使用寿命等减少能源损失的尖端技 术这种技术作为绿色成长产业的核心技术,可提高传统机械零部件的附加价值,将发展成为 国家技术发展的源泉技术本项目将利用照相平版印刷术和电化蚀刻术研究金属表面织构化的关键技术，并通过在 不同摩擦副方式及试验条件下，对不同形状、大小、深度以及密度的纳米表面图形的摩擦试 验，导出影响表面织构化的主要设计因子及表面织构化的摩擦学设计基准以及不同纳米表面 图形几何学因素在滑动摩擦中的特性变化本项目拟通过系统的试验以及 Stribeck 曲线、 摩擦系数地图等分析方法，分析纳米表面图形摩擦学应用的低摩擦机理等摩擦学行为，为表 面织构化新技术的发展及其实际应用提供可靠的理论依据和关键技术 ,从而实现微/纳米表 面图形的广泛应用照相平版印刷术;微米图型;电化蚀刻术;摩擦学With the development of nano ultraprecise machining technique, a sophisticated technique of reducing energy loss appeared, which is making the micropatterning on metal surface to reduce the friction and to promote wear-resistance and prolong the service life of mechanical components under lubrication. As the key technology of green industry, it can improve the additional value of mechanical components and will become the key technology of the national technology development.We study the key technology of metal surface texturing by using photolithography and electrochemical etching, and derive the main design factor and tribological properties of metal surface texturing under different shape ，size and depth by using different friction pairs and test conditions. This study will analyze the mechanism of low friction for the tribological application of nanopatterning on metal surface with using Stribeck curve and friction coefficient map, which provides a reliable basis and key technology for the developing and. Hence the application of micropatterning is realized.photolithography, micropattern, electrochemical etching, steel在钢表面制作微米图型的技术研究本文主要采用了微机电系统(MEMS)关键技术的照相平版印刷术。
通过电化蚀刻术进行了钢表面微米图 型的制作以及不同蚀刻方法的基础研究观察了在不同电化蚀刻时间和图型密度下,微米图型蚀刻深度和加 工表面的变化规律,并分析了他们之间相关关系结果表明,当改变电化蚀刻时间时,钢表面微米图型的面积以及微米图型的蚀刻深度的变化具有一定的规律电化蚀刻术在金属材料表面的微米图型加工中,具有微米 图型清晰、表面质量好以及大量生产等优点而且,在大部分高强度金属材料表面上可加工出不同形状、大 小以及深度的微米图型照相平版印刷术;微米图型;电化蚀刻术;钢Technique Research of Making Micropatterning on SteelSurfaceREN Jing-ri1 , CHAE Young-hun2(1.Department of Mechanical Engineering,Yanbian University, Yanji 133002, China;2. Research institute of Tribology, Kyungpook National University, Taegu 702701, Korea)Abstract: The key technique of micro-electromechanical systems (MEMS) using photolithography, through the electrochemical etching to make the micropatterning on surface of the steel and to study the different basic methods of etching . Observing the etch depth of micron-graphics and the variation of the processing surface under the different electro-chemical etching time and the graphics density and examining their relationship. The results indicate that the area of the steel surface micron-graphics and the depth of micron-graphics etching have a certain variation when changing the electro-chemical etching time.The electro-chemical etching technique has a clear micron-graphics ，a good surface quality and an advantage of mass production under the processing of the micron graphics on the metal surface . Furthermore ，it can process the different shape，size and depth micron-graphics in most of high-strength metallic materials surface.Key words: photolithography, micropattern, electrochemical etching, steel轴承座的实体建模、网格划分、加载、求解及后处理 具体步骤：首先进入前处理(/PREP7)1. 创建基座模型 生成长方体Main Menu：Preprocessor>Modeling>Create>Volumes>Block>By Dimensions 输入 x1=0,x2=3,y1=0,y2=1,z1=0,z2=3平移并旋转工作平面Utility Menu>WorkPlane>Offset WP by IncrementsX,Y,Z Offsets 输入 2.25,1.25,.75 点击 Apply XY，YZ，ZX Angles 输入 0，－90 点击 OK。
创建圆柱体Main Menu：Preprocessor>Create>Volumes>Cylinder> Solid CylinderRadius 输入 0.75/2, Depth 输入一1.5，点击 OK拷贝生成另一个圆柱体Main Menu：Preprocessor>Modeling>Copy>Volume 拾取圆柱体,点击 Apply, DZ 输入 1.5 然后 点击 OK从长方体中减去两个圆柱体Main Menu：Preprocessor>Operate>Booleans>Subtract>Volumes 首先拾取被减的长方体，点 击Apply然后拾取减去的两个圆柱体，点击OK使工作平面与总体笛卡尔坐标系一致Utility Menu>WorkPlane>Align WP with> Global Cartesian2. 创建支撑部分 Utility Menu: WorkPlane -> Display Working Plane (toggle on) Main Menu: Preprocessor -> -Modeling-Create -> -Volumes-Block -> By 2 corners & Z 在创建实体块的参数表中输入下列数值:WP X = 0WP Y= 1Width = 1.5Height = 1.75Depth = 0.75OKToolbar: SAVE_DB3. 偏移工作平面到轴瓦支架的前表面Utility Menu: WorkPlane -> Offset WP to -> Keypoints +1. 在刚刚创建的实体块的左上角拾取关键点2. OKToolbar: SAVE_DB4. 创建轴瓦支架的上部Main Menu: Preprocessor -> Modeling-Create -> Volumes-Cylinder -> Partial Cylinder1) . 在创建圆柱的参数表中输入下列参数:WP X = 0WP Y = 0Rad-1 = 0Theta-1 = 0Rad-2 = 1.5Theta-2 = 90Depth = -0.752) . OKToolbar: SAVE_DB5. 在轴承孔的位置创建圆柱体为布尔操作生成轴孔做准备Main Menu: Preprocessor -> Modeling-Create -> Volume-Cylinder -> Solid Cylinder +1.) 输入下列参数:WP X = 0WP Y= 0Radius = 1Depth = -0.18752. ) 拾取 Apply3.) 输入下列参数:WP X = 0WP Y= 0Radius = 0.85Depth = -24. ) 拾取 OK->6. 从轴瓦支架“减"去圆柱体形成轴孔.Main Menu: Preprocessor -> Modeling-Operate Subtract -> Volumes +1. 拾取构成轴瓦支架的两个体，作为布尔“减”操作的母体。
单击 Apply2. 拾取大圆柱作为“减”去的对象单击 Apply3. 拾取步 1 中的两个体，单击 Apply4. 拾取小。