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1、 16 122008M 12 ; Optics and Precision Engineering Vol.16 No. 12Dec. 2008Received date: 2007209220; Revised date: 2008205230.Foundation item: Supported by the NSAF( No. 10676015); the National Natural Science Foundation of China(No.50621201); the National 863 High Technology Research and Development
2、Program of China(No.2007AA03Z107); the New Star in Science and Technology of Beijing Novaprogram(No.2006B56) c I | 10042924X(2008)1222378206 K s # L 李龙土,邬军飞,褚祥诚,季 叶(清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室,北京100084)K 1 : K s Z E ,s D M M + b a ( L #+ j M Y ;9 a # F M M 3 1 ;Y V M k a k M 1 L K s b F 60 V(120 Vp
3、2p)H , M s Y 166 Lm 34.7 m# N,L T y K r bN , k + , q 310 Hz, q / F 20 Vp2p , M V r 1.7 mmb K s T #L ! 9 4 G b1 o M :压电双晶片;有限元法;PZT;偏转位移 m s | :TN384 D S M :AFiniteelement analysis and experiment on piezoelectricbimorphLI Long2tu,WU Jun2fei,CHU Xiang2cheng, JI Ye(StateKey Laboratory of New Ceramics a
4、nd Fine Processing, Department of MaterialScienceand Engineering, Tsinghua University, Beijing 100084,China)Abstract: The deformation of bimorph is analyzed by using the Finite Element Method (FEM). Theinfluences of middle elastic beam and piezoelectric layer on the deflection actuator are studied.
5、Thecorrelations of the applied voltage, the elastic modulus of beam and thethickness of piezoelectric layerare analyzed quantitatively to providea theoretical basis and design method for the bimorph actuators.The mechanical force derived from the bimorph deformation is also studied. Furthermore, exp
6、eri2ments are carried out to validate thefinite element model. Thevilidation shows that the tip2deflectioncan be as high as 166 Lm at a voltage of 60 V, while the mechanical force is 34.7 m # N. The experi2ment results demonstrate that the piezoelectric bimorph model used in this paper is feasible a
7、nd effec2tive. Moreover, the resonance property of the bimorph is measured by the polytec 3002F scanning vi2brometer. Thebimorph performs an exceeding deflection about 1.7 mm at thetip when it resonates ata frequency about 310 Hzunder an alternating voltage of 20 Vp2p.These numerical and experimenta
8、lresults are useful to design and optimize the piezoelectric bimorph.Keywords: piezoelectric bimorph; Finite Element Method(FEM); PZT; tip2deflection1 IntroductionPiezoelectric materials have been widelyused as sensors and actuators in several engi2neering applications, i.e. micro2electro2mechan2ica
9、l system (MEMS)1 . Piezoelectric bimorphsarethe oldest form of basic piezoelectric adaptivestructures,their invention dates can traceback tothe early 1930s. A comprehensive and detailedhistorical review of the applications of piezoelec2tric bimorphs was given by Smits et al. in thebeginning ofthelas
10、t decade2. The properties ofbimorph type piezoelectric actuator are low pro2file, low power consumption and no electro2mag2netic interference (EMI)3. With the growth ofthe relatively new field of adaptive structures,piezoelectric bimorph structure was widely in2vestigated as sensors and actuators fo
11、r the appli2cations of various wobbling mechanisms.In this paper, the actuator deformation isanalyzed using finite element method (FEM).The finite element method is usually used to in2vestigate coupled mechanical and electricalfields4. The influences of the middle elasticbeam and the piezoelectricla
12、yer on thedeflectionactuator are studied, and the correlation of ap2plied voltage, the elastic modulus of beam, andthe thickness of piezoelectric layer is analyzedquantitatively to provide a theoretical basis anddesign method for the bimorph actuators. Fur2thermore, experiment results show that the
13、pie2zoelectric bimorph model used in this paper isfeasible and effective.Based on the results, the method can pre2dict the displacement of bimorph beams and oth2er similar PZT structures. The method presen2ted in this paper is advantageous because it ismore concise and easier to utilize for design o
14、pti2mization than any other existing techniques.2 Structure and working principleThe bimorph can be regarded as a three2layer element with the bonding layers negligible,as shown in Fig.1. A middle shim is sandwichedbetween the two piezoelectric plates.Fig.1 Structure of piezoelectric bimorph cantileverThe principal set2up of a bimorph is madeby bonding two piezoelectric batches to each sideof a passive elastic plate. When
