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1、真空技术基础 陈梓1本科毕业论文论文题目： 高真空系统的维修与检测 院 系： 物理学 专 业： 物理学 姓 名： 陈梓 学 号： 0519090 指导教师： 乐永康 职 称： 高级讲师 2009 年 6 月 9 日真空技术基础 陈梓2学生姓名 陈梓 学 号 0519090 专 业 物理学指导教师姓名 乐永康 职 称 高级讲师 部 门 物理学系论文题目 高真空系统的维修与检测论文摘要:真空技术在现代科学研究和生产实践中的应用非常广泛，真空科学是一门重要的学科方向。懂得如何操作和检测真空系统，甚至学会如何维护一个真空系统是一项重要的实验技能。本文的主要工作是修复一套多年未维护且有故障的用于制作弗兰
2、克赫兹实验管的高真空系统，并以此为例，讲述了高真空的获得、检测和维护的相关知识。最后对修复后的系统进行了抽速、器壁放气等测试，比较了两种不同的粗真空计的测量结果，并对所得到的结果进行了分析讨论。关键词:高真空技术 真空系统的维修 真空检测AbstractVacuum technique is widely used in modern research and daily practice. Vacuum science is a very important subject.The main purpose of this work is to repair a high-vacuum sy
3、stem, which was used for the fabrication of Frank-Hertz tube. The system has not been operated for several years. Based on this, this thesis introduced systematically related topics on operation, measurement and maintenance of a high-vacuum system. At last, pumping speed and out-gassing of the chamb
4、er were investigated on the repaired system. As well, measuring results from two different kinds of gauge for coarse vacuum were compared. Related topics were further discussed.Key wordsHigh-vacuum technology, repair a high-vacuum system, vacuum testing真空技术基础 陈梓3摘要真空技术在现代科学研究和生产实践中的应用非常广泛，真空科学是一门重要的
5、学科方向。懂得如何操作和检测真空系统，甚至学会如何维护一个真空系统是一项重要的实验技能。本文的主要工作是修复一套多年未维护且有故障的用于制作弗兰克赫兹实验管的高真空系统，并以此为例，讲述了高真空的获得、检测和维护的相关知识。最后对修复后的系统进行了抽速、器壁放气等测试，比较了两种不同的粗真空计的测量结果，并对所得到的结果进行了分析讨论。关键词高真空技术 真空系统的维修 真空检测真空技术基础 陈梓4AbstractVacuum technique is widely used in modern research and daily practice. Vacuum science is a v
6、ery important subject.The main purpose of this work is to repair a high-vacuum system, which was used for the fabrication of Frank-Hertz tube. The system has not been operated for several years. Based on this, this thesis introduced systematically related topics on operation, measurement and mainten
7、ance of a high-vacuum system. At last, pumping speed and out-gassing of the chamber were investigated on the repaired system. As well, measuring results from two different kinds of gauge for coarse vacuum were compared. Related topics were further discussed.Key wordsHigh-vacuum technology, repair a
8、high-vacuum system, vacuum testing真空技术基础 陈梓5目录导言 .2第一章：真空技术概述 .21.1 真空物理概念 .21.1.1 何为真空 .21.1.2 真空的分类应用 .21.1.3 真空的气体动力学模型 .31.1.4 真空系统的基本组成 .51.2 真空密封技术 .51.2.1 静密封：永久密封 .51.2.2 静密封：可拆密封 .51.2.3 动密封 .71.2.4 动密封真空阀门 .81.3 真空抽气技术 .91.3.1 机械真空泵 .91.3.2 蒸气流真空泵 .111.3.3 气体捕集式真空泵 .121.4 真空计量技术 .131.4.1 绝对真空计 .131.4.2 相对真空计 .131.4.3 真空计的“量程” .15第二章：JK-100 高真空抽气系统的维修 .162.1 JK-100 高真空抽气系统概述 .162.2 系统的拆卸、清洗、更换 .172.2.1 拆卸 .172.2.2 清洗 .172.2.3.更换 .182.2.4.完成 .182.3 组装过程中的问题与解决 .18第三章：真空系统特性测定 .193.1 真空系统抽气时间研究 .193.2 真空系统漏气研究 .223.3 电阻真空计、热偶真空计的关联曲线 .233.4 真空材料的除气研究 .25结语 .29参考文献 .30致谢
