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1、e液体静压转台有限元建模与仿真分析e（e）指导教师：e摘要液体静压转台是采用液体静压轴承作为支承，将转台主轴功能与电动机功能从结构上融为一体的功能部件，它集成了液体静压轴承技术、冷却密封控制技术和变频电动机技术等，其功能是带动工件实现精密/超精密旋转（定位）和精密加工。液体静压转台采用压力油膜作为工作介质，具有高承载刚度特性，摩擦副间无磨损，可克服爬行现象，运转灵敏平稳。同时，承载油膜的误差均化作用又使得静压转台具有极高的回转精度和定位精度。静压转台由于上述突出优点在超精密机床和仪器行业获得了广泛应用。本文主要从以下几个方面对液体静压转台系统进行研究：根据工程实际情况，建立液体静压油膜转台系统
2、的有限元模型，同时设置油腔个数、油膜刚度、转台材料弹性模量等条件的取值范围;根据液体静压转台油膜流动的 N-S 方程，建立了矩形、扇形和圆形油腔的动压承载力模型，综合动、静压承载力得到了综合承载力理论模型，继而推导了油膜刚度理论模型。 建立了液体静压转台系统的动力学有限元模型，分析了不同油膜支承模型的动力学特性，针对不同材料弹性模量、油膜刚度、油腔个数的情况，进行了系统的模态分析，获得了各参数对结构振动频率的影响规律。 计算结果符合预期设想，为进一步研究液体静压转台系统的其他方面的性能，提高其工作性能和加工精度提供了理论依据，对实际工程具有很大的理论意义及实际参考价值。关键词液体静压转台；有限
3、元；静力学；动力学；振动频率eHydrostatic turntable finite element modeling and simulation analysise(e)Tutor :eAbstract: Hydrostatic hydrostatic bearing turntable is the use as a support, will feature the turntable spindle motor function and functional integration from the structure, which integrates the hydrostat
4、ic bearing technology, cooling technologies and sealed inverter motor control technology, which function is to bring the work to achieve precision / ultra-precision rotation (orientation) and precision machining. Hydrostatic pressure turntable uses film as a working medium, high bearing stiffness ch
5、aracteristics, friction between the wear, can overcome the creeping phenomenon, sensitive and smooth operation. Meanwhile, the film carries an error homogenization also makes hydrostatic rotary turntable with high precision and accuracy. Highlight the advantages of the above hydrostatic turntable in
6、 ultra-precision machine tools and equipment industry has been widely used.This paper studies the following aspects of hydrostatic turntable system:According to the actual situation of the project, the establishment of hydrostatic film. Finite element model of a turntable system, and set the range o
7、f the number of oil chamber, the film stiffness, elastic modulus turntable and other conditions;According to the film flow hydrostatic turntable NS equations, dynamic pressure bearing capacity model established rectangular and circular oil chamber fan, integrated dynamic, static carrying capacity ca
8、rrying capacity has been integrated theoretical model, and then derive a theoretical model of film stiffness .The dynamic finite element model of hydrostatic turntable system, analyzes the dynamics of the oil film bearing different models for different elastic modulus, the stiffness of the film, the
9、 number of cases the oil chamber, conducted a modal analysis system, access to the various parameters on the structural vibration frequency.The results in line with expectations envisaged for further study other aspects of the performance of hydrostatic turntable system, improve the performance and
10、accuracy of their ework provides a theoretical basis, has great theoretical significance and practical value for the actual project.Keywords: Hydrostatic turntable; finite element; dynamics; vibration frequencyeI目 录1.绪论 .11.1研究背景及意义 .11.2 液体静压转台的供油方式 .21.3国内外研究现状 .31.4静压转台技术的未来发展趋势 .61.5本文的研究内容 .72.
11、有限元方法概述 .92.1有限元分析方法简介 .92.1.1有限元法的形成 .92.1.2有限元法的基本思想 .92.2.有限元法的分析过程 .102.3有限元法的软件实现 .113.液体静压转台 .133.1液体静压技术 .133.2液体静压转台： .133.3一种大径高比超精密液体静压转台 .154.液体静压油膜一转台系统静力学分析 .194.1有限元模型的建立 .19eII4.1.1油腔数目的选取 .194.1.2油膜支承力的简化 .194.1.3材料弹性模量的选取 .204.1.4转台尺寸的选取 .204.2液体静压油膜一转台系统应力的影响分析 .204.2.1弹性模量对液体静压油膜一
12、转台系统应力的影响分析 .204.2.2油膜刚度对液体静压油膜一转台系统位移及应力的影响分析224.2.3油腔个数对液体静压油膜一转台系统位移及应力的影响分析234.3本章小结 .255. 液体静压转台系统综合承载力及动力学分析 .265.1液体静压转台系统综合承载力及油膜刚度推导 .265.1.1不同形 状油腔的分布压力计算 .265.1.2不同形状油腔的静压承载力建模 .295.1.3油液封油边间隙流动特性分析 .305.1.4不同形状油腔的动压承载力的建模： .315.2液体静压转台系统模态分析 .335.2.1液体静压转台系统基于简化油膜模型的模态分析 .335.2.2液体静压转台系统流固藕合的模态分析 .345.2.3液体静压转台系统振动频率的参数影响分析 .345.3液体静压转台系统谐响应
