《晶体生长氧浓度分布》由会员分享，可在线阅读，更多相关《晶体生长氧浓度分布（6页珍藏版）》请在金锄头文库上搜索。
1、,FEMAGSoft 2013,晶体生长氧浓度分布,3. Species transport,FEMAGSoft 2013,Crucible radius = 0.1 m Crystal radius = 0.05 m Crystal rotation rate = -16 rpm Crucible rotation rate = 8 rpm Pulling rate = 1 mm/min,Limited Mixing Length turbulence model,Calculation of oxygen and boron concentration in a growing 100 m
2、m silicon crystal,Species transport (contd),FEMAGSoft 2013,Temperature field in the melt and crystal,Streamlines in the melt,Marangoni convection is taken into account,Mirror boundary conditions are applied at the melt surface,Different color ranges are used in crystal and melt,Species transport (co
3、ntd),FEMAGSoft 2013,Streamlines in the melt,Oxygen concentration in the melt and crystal,Marangoni convection is taken into account,Mirror boundary conditions are applied at the melt surface,Different color ranges are used in crystal and melt,Species transport (contd),FEMAGSoft 2013,Streamlines in t
4、he melt,Boron concentration in the melt and crystal,Marangoni convection is taken into account,Mirror boundary conditions are applied at the melt surface,Different color ranges are used in crystal and melt,Species transport (contd),FEMAGSoft 2013,Magnetic field intensity = 0.3 T Pulling rate = 0.3 mm/min Crucible radius = 0.032 m Crystal radius = 0.016 m Crystal rotation rate = 0 rpm Crucible rotation rate = 0 rpm,Resulting oxygen concentration in the melt,Quasi-steady prediction of oxygen concentration in a small CZ silicon furnace under the effect of a TMF,Species transport (contd),
