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1、M icroelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated as integrated circuits on (primarily) silicon wafers in a batch mode. Commercial MEMS products include pressure sensors
2、, acceleration sensors, gyros, ink-jet nozzles, read-write head positioners in hard drives, and digital light processors (DLPs) in projectors and television sets. MEMS-based integrated circuit (IC) products created a US$8 billion market in 2005, which is forecasted to grow to over US$40 billion in 2
3、015 and over US$200 billion in 2025. About 40% of the current MEMS market is formed by sensors. MEMSs are often labeled “micro systems” in Europe and “micro machines” in Japan. From a practical point of view, MEMS devices are ICs performing a variety of nonelectrical sensing and actuation functions
4、in mechanical, optical, biotech, and other domains. MEMS process- ing creates structures on wafers with depths an order or two magnitude larger than transis- tors (see Figure 1). The beginning of MEMS technology dates back to semiconduc- tor discoveries at Bell Laboratories in the early 1950s, and m
5、any consider the 1954 paper 1 announcing the dis- covery of the piezoresistive effect in silicon and ger- manium as the birth of MEMS. MEMS products, limited in the first decades to pressure and acceleration sensors, significantly lagged in affecting the nations economy and wealth. In the 1980s and
6、1990s, however, many governments heavily funded the develop- ment of MEMS technology, with the Unit- ed States, Japan, and Germany leading investment levels significantly, advancing technology, accelerating the commercial- ization progress, and helping to grow the market to billions of dollars. MEMS
7、 technology encompasses a variety of processes enabling three-dimensional (3- D) shaping of wafers or stacks of wafers. While most of the applications use silicon wafers, many other materials have been used, including glass and quartz wafers, as well as plastic. Why MEMS for Sensors and Microstructu
8、res A high level of interest in MEMS technology comes from both business and technical directions. They are attractive to business because multiple emerging markets for MEMS devices promise large financial gain. This potential for growth is confirmed by a cumulative venture capital industry investme
9、nt into MEMS- based companies, estimated at over US$1 billion as of 2005. Technical attractiveness includes multiple factors: Cost of the single device scales with its size (as it does for ICs) as a result of batch man- ufacturing technology (multiple devices photolithographically defined on a wafer
10、, and wafer cost is fixed for a given process). Excellent mechanical properties resulting from extremely pure crystalline structure; eliminating mechanical fatigue and hysteresis makes silicon almost a perfect material for sensors. Its mechanical properties are comparable to steel (see Table 1). IC
11、industry-created technology infrastructure immediately available for MEMS batch- wafer processing technology, cutting-edge IC processing equipment, ultrapure (no mechanical fatigue) low-cost materials, sophisticated diagnostic and test equipment, design and simulation tools (software), and high-volu
12、me IC packaging technologies. There is potential for the integration with IC circuitry to create low-cost integrated mechanical, optical, and biological systems on a chip. Janusz Bryzek, Shad Roundy, Brian Bircumshaw, Charles Chung, Kenneth Castellino, Joseph R. Stetter, and Michael Vestel Advanced
13、IC Sensors and Microstructures for High Volume Applications 8IEEE CIRCUITS special thanks to Chris Keller. Mag = 4.13 KX (a)(b) 02/NOV/0125 15 kV 1 mm 2m EHT = 5.00 kV WD = 3 mm Signal A = InLens Photo No. = 545 Date : 19 Sep 2005 Time : 0:53:13 Steel Silicon Units Yield strength3,000 nm), and ultra
14、- violet (UV) (200400 nm). The world market for spectrome- ters is estimated at to be about US$8.5 billion in 2005 7, and it is very frag- mented. The majority of applications require bringing the sample to a spec- trometer in the lab, as spectrometers are too big, heavy, and power hungry to be carr
15、ied around. The compounded growth rate is only about 5%/year. A portable subset of the spectrome- ter market, however, while representing only about US$200 million/yr has a growth rate of about 20%/yr. Portable instru- ments have the size comparable to digital voltmeters and are brought to the sampl
16、e (e.g., to the airport). The application range of spectrometers is very broad. environmental: water, air, and exhaust gas analysis security: detection of explosives and chemical and biowarfare agricultural: soil and plant material analysis industrial: water, air, gas, and production fluids analysis medical: drug testing, diagnostics, and noninvasive glucose measurement consumer: cosmetics analysis and color sensing for printers. To enable high growth, the next gene
