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1、2018年9月,J.S.,1,MFC TRAINING,MFC=MASS FLOW CONTROLLERS gaojw 2002年5月15日 CSMC-HJ,2018年9月,J.S.,2,MFC在半导体产业中的一般使用方法,2018年9月,J.S.,3,MFC的组成部分,a mass flow meter (MFM)1. a heated sensing tube（测量实际流量）2. bypass（主要气体流经的地方）3. Signal electronics amplify（信号的电路放大） The proportioning controller, 1.solenoid valve 2.t
2、he control electronics（The controller drives the valve to the correct position so that the measured flowequals the desired flow setpoint.）,2018年9月,J.S.,4,SENSOR,Sensor是利用气体的热量原理来直接测量流量的。 （因为每种气体分子有一种特定的吸热能力，通常叫做“比热”它只与质量和物理特性有关，与气体温度和压力无关） q = m c p D T（cp为比热）,2018年9月,J.S.,5,SENSOR,两个线圈电阻相同，所加电压相同，温
3、度相同假定为T，假定气体温度为T1，当气体流经线圈1时气体的吸热量为Q1=CP（T-T1）气体温度升高为T1+ D T, 当气体流经线圈2时气体的吸热量为 Q2=CP（T -（T1+ D T） ），因此Q2R2.根据惠斯登电桥原理，当桥臂不平衡时中间接点之间有电势差，经电路放大后有0-5VDC输出,2018年9月,J.S.,6,SENSOR,2018年9月,J.S.,7,SENSOR,热洪吸现象 The IsoSensor（专利技术）高稳定性，低漂移量（每年0.6%），消除热洪吸。 Coil temperatures are about 70oCabove ambient.,2018年9月,J
4、.S.,8,Bypass,Basic Functions. Creates a pressure drop between sensor inlet/outlet. Establishes laminar flow upstream & downstream of sensor. Sets the flow range by diverting portion of total flow via the sensor. Maintains a constant ratio of flow between sensor and total flow (independent of gas tem
5、perature and pressure).,2018年9月,J.S.,9,Bypass Designs（FC-260/290）,2018年9月,J.S.,10,Bypass Designs （FC-262/2925）,2018年9月,J.S.,11,Bypass Designs （FC-280 ）,2018年9月,J.S.,12,Bypass Designs （ FC-2950/79 ）,2018年9月,J.S.,13,VALVE DESIGN,Quick response High purge capability Easily adjustable Manufacturing cons
6、iderations,2018年9月,J.S.,14,VALVE TYPES,Electric solenoid valve Quick response, insensitive to temperature changes, high purge, simple, easy adjustment Thermal valve Slow response, sensitive to temperature changes Piezo electric valve Quick response, requires 100V circuitry, higher cost,2018年9月,J.S.,
7、15,Control Valve,Types of control valves: Thermal valves - inexpensive, stable, repeatable, but slow (5-10 seconds common). Solenoid valves - moderately expensive, stable, repeatable, and much faster (0.5 to 5 seconds). Piezoelectric valves - most expensive, fastest, but susceptible to changes in am
8、bient temperature and age. Typical valve response time 250 msec to 1 second.,2018年9月,J.S.,16,UNIT MFC,2018年9月,J.S.,17,UNIT MFC,Flow Controller / Flow Meter ModelMass Flow Controllers: UFC-XXXX (Unit Flow Controller)Mass Flow Meters: UFM-XXXX (Unit Flow Meter) Semiconductor Industry ModelsAnalog Mode
9、ls: 1660, 1662, 8100, 8160, 8162, 8260, 3101, 2060 and 8262Digital Models: 1661, 1663, 8101, 8161, 3161 and 8163,2018年9月,J.S.,18,不同MFC间的比较,2018年9月,J.S.,19,不同MFC间的比较,2018年9月,J.S.,20,MFC指标,Auto Shutoff OptionWith the Auto Shutoff option a setpoint command of less than 2% (0.1 Vdc)closes the MFC contro
10、l valve. Response Time OptionsFast: =1 Sec to a setpoint command of 20%-100%Soft Start: :5 second linear rampoptions: 4-6, 6-10, 10-15, 20-30, or 40-60 seconds Valve OptionsNormally-closed (standard), normally-open (option). Flow Direction Options“Standard”: Sensor upstream and valve downstream“Pres
11、sure buffered”: Valve upstream and sensor downstream,2018年9月,J.S.,21,MFC指标,Auto Zero OptionThe Auto Zero feature detects zero offset during no-flow conditions and electronically re-zeros the output signal. Auto Zero can be of great benefit in reducing drift and increasing equipment uptime. Fittings
12、OptionsSwagelok , VCR , VCO , and top-mount 工作电压：+-15V .,2018年9月,J.S.,22,安装方式,HOS horizontal or sideways HOV- horizontal or vertical,2018年9月,J.S.,23,信号连接接口,B Brooks compatible 15-pin D connector E 20-pin card edge connector (Standard) M MKS compatible 15-pin D connector U Unit 15-pin D connector T U
13、nit 9-pin D connector S STEC compatible 9-pin D connector,2018年9月,J.S.,24,1. Calibration reference for traceability 2. MFC Model Number 3. Part Number 4. Serial Number 5. Full Scale Flow Range for the MFC 6. Nameplate Gas, The Gas the Unit is Calibrated For 7. Gas Used to Calibrate the MFC 8. The Co
14、nversion Factor for the Nameplate Gas to the Calibration Gas, Used as a Divisor 9. The Conversion Factor for the Name Plate Gas to N2, 10. Response Speed 11. Operating Attitude 12. Auto-Shutoff Option Included 13. Customer Special Request Number 14. Customer Part Number 15. Conversion Factor Version
15、 Number 16. The Gas Used to Tune the Valve 17. The Outlet Pressure, A=Atmosphere, V=Vacuum,MFC铭牌,2018年9月,J.S.,25,DIGITAL MFCs,Improved performance No mechanical adjustments Multiple process Multiple communication protocol Resident totalizers Data acquisition for SPC,2018年9月,J.S.,26,TOP MOUNT TECHNOLOGY,2018年9月,J.S.,27,TOP MOUNT TECHNOLOGY,Compact - reduce overall length and space requirements Clean - reduce contamination Service - easy to install and remove Remote electronics option - high temperature/vapor controllers,2018年9月,J.S.,28,TOP MOUNT GAS SYSTEM,
