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1、I-Shou University C.S. Lam 9/15/03- 1 -教育部九十二年度航太科技教育改進計畫微航電講習班教育部九十二年度航太科技教育改進計畫微航電講習班 “微聲波無線感測及濾波元件設計與實務微聲波無線感測及濾波元件設計與實務”義守大學義守大學 September 1516, 2003Temperature Stable Cuts of Quartz for SAW ApplicationsC.S. Lam TXC CorporationI-Shou University C.S. Lam 9/15/03- 2 -ContentsWhat is a Wave?Bulk an
2、d Surface Acoustic Wave (BAW and SAW) SAW Technology Applications in the Electronics IndustryLST-Cut of QuartzK-Cut of QuartzIn-Plane 33 Rotated Y-cut of QuartzHVPSAW (High Velocity Pseudo SAW) Cut of Quartz DiscussionI-Shou University C.S. Lam 9/15/03- 3 -What is a Wave?Definition of a WaveWebsters
3、 dictionary defines a wave as “a disturbance or variation that transfers energy progressively from point to point in a medium and that may take the form of an elastic deformation or of a variation of pressure, electric or magnetic intensity, electric potential, or temperature.“ The most important pa
4、rt of this definition is that a wave is a disturbance or variation which travels through a medium. The medium through which the wave travels may experience some local oscillations as the wave passes, but the particles in the medium do not travel with the wave. I-Shou University C.S. Lam 9/15/03- 4 -
5、Body Waves and Surface WavesBody Waves travel through the interior of the Earth.P, Primary, or Compressional waves travel the fastest (6 km/sec in the upper crust).S, Secondary, or Shear waves are somewhat slower (3.5 km/sec in the upper crust).http:/www.ndt-ed.org/EducationResources/CommunityColleg
6、e/Ultrasonics/Physics/acousticplane.htm is the density, and and are the Lam constants. I-Shou University C.S. Lam 9/15/03- 5 -Body Waves and Surface WavesSurface Waves travel along the Earths surface. Slower than body waves. Do the most damages.Love waves shake the ground side-to-side like an S wave
7、. Rayleigh waves displace the ground like rolling ocean waves. The ground rolls forward and up and then down and backwards. I-Shou University C.S. Lam 9/15/03- 6 -8/17/1999, Turkey Earthquake (18,000 persons killed about 40,000 injured)Origin time 00:01:38 UTC/GMT, Latitude 40.64 degrees N, Longitud
8、e 29.83 degrees EMagnitude: MW 7.8 based on 4 mm 100 sec Rayleigh waves near Leonard, OKDepth 10 kilometersI-Shou University C.S. Lam 9/15/03- 7 -Rayleigh Wave (Polarization)I-Shou University C.S. Lam 9/15/03- 8 -Water Wave and Surface Acoustic Wavehttp:/www.kettering.edu/drussell/Demos/waves/water.
9、gifhttp:/www.kettering.edu/drussell/Demos/waves/rayleigh.gifI-Shou University C.S. Lam 9/15/03- 9 -Bulk Slow Shear Bulk Fast Shear Quasi-LongitudinalInfinite Medium (Bulk)SAW LSAW/PSAWHVPSAWVelocityInfinite and Semi-infinite MediaI-Shou University C.S. Lam 9/15/03- 10 -Wave in Solids Calculatorhttp:
10、/www.eng.vt.edu/fluids/msc/jscalc/wscalc02.htmWAVES IN SOLIDS CALCULATOR Welcome to my Waves in Solids Calculator. This module can calculate the S-, P-, and Rayleigh wave speeds for a variety of common solids. We also compute the depth at which the particle motion in a right-moving Rayleigh wave swi
11、tches from a counterclockwise ( seen near the surface ) to a clockwise motion ( as seen below the critical depth ). No inputs are required. Just choose your material and hit the Compute Speeds button. I-Shou University C.S. Lam 9/15/03- 11 -Many Types of SAWSAWRayleigh WaveLamb WaveLove WaveSSBWSTWL
12、SAWPSAWHVPSAWBGS WaveStoneley WaveSezawa WaveXZI-Shou University C.S. Lam 9/15/03- 12 -Piezoelectricity and QuartzTij= cijklSkl ekijEkDi= eijkSjk+ dijEjI-Shou University C.S. Lam 9/15/03- 13 -Interdigital Transducer (IDT)I-Shou University C.S. Lam 9/15/03- 14 -SAW Filter (Transversal)Bidirectional S
13、AW Filter(Electrical/Mechanical/Electrical Conversions)I-Shou University C.S. Lam 9/15/03- 15 -SAW Resonator I-Shou University C.S. Lam 9/15/03- 16 -1-Port and 2-port SAW ResonatorsI-Shou University C.S. Lam 9/15/03- 17 -BAW- and SAW-based ProductsBAW-based (MHz 200 MHz)SAW-based (50 MHz 2.5 GHz)Cry
14、stal and Tuning ForksSAWR MCFSAWF XOSO VCXOVCSO TCXOTCSO OCXOOCSO Timing Module (TM) *Timing Module (TM) * Including Frequency Translator (FX), Clock & Data Recovery (CDR) and Clock Smoother (CS)I-Shou University C.S. Lam 9/15/03- 18 -XO/TCXO/OCXOTemperature SensorTemperature SensorCompensation Netw
15、ork or ComputerCompensation Network or ComputerXOXO Temperature Compensated (TCXO)-450Cff +1 ppm-1 ppm+1000C TOven controlOven controlXOXOTemperature SensorTemperature SensorOven Oven Controlled (OCXO)-450Cff +1 x 10-8-1 x 10-8+1000C TVoltage TuneOutput Crystal Oscillator (XO)-450C-10 ppm+10 ppm 250
16、CT+1000CffI-Shou University C.S. Lam 9/15/03- 19 -SAW Device ApplicationsHitachi, VI, et al.5100100 MHz to 2.5 GHzSAWFs for clock and data recovery applications, etc.80s onICS, SAWTEK, Epson, et al.3300100 MHz to 1.1 GHzSAW oscillators for frequency sources, computer servers, IFF, telecom equipment, etc.70s onICS, SAWTEK, Epson, VI, etc.2030015