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1、南京航空航天大学硕士学位论文硬质合金基体上金刚石涂层沉积条件对其结合性能的影响姓名：赵云申请学位级别：硕士专业：机械制造及其自动化指导教师：徐锋2011-03南京航空航天大学硕士学位论文 i摘 要 随着 CVD 金刚石涂层的制备技术日趋完善，CVD 金刚石涂层工具在汽车、航空和航天等领域具有巨大的应用前景，但要实现 CVD 金刚石涂层工具的工业应用仍有许多问题需要解决，特别是提高 CVD 金刚石涂层与基体之间结合性能。 本文以提高 CVD 金刚石涂层与硬质合金基体的结合性能为出发点，研究了硬质合金基体的预处理工艺和 CVD 金刚石涂层的沉积工艺对膜/基结合性能的影响。本文主要开展了如下工作：
2、1. 对于硬质合金基体开展了氢气还原预处理和碱洗酸洗两步法预处理的比较研究， 碱洗酸洗两步法比较适合硬质合金基体预处理，利用压痕法评价了硬质合金基体上 CVD 金刚石涂层的膜/基结合性能，研究了刻蚀深度对膜/基结合性能的影响。最佳的预处理工艺参数为碱洗 20 min，酸洗 10 s。 2. 建立了金刚石涂层热应力有限元模型， 通过有限元模型研究了各工艺参数对于热应力的影响，有限元仿真的结果显示，沉积温度、冷却速度、膜厚和硬质合金基体前角对热应力的影响较大。 3. 研究了碳源浓度、沉积温度、沉积时间和反应室气压对硬质合金基体沉积 CVD 金刚石涂层的形貌、质量和膜/基结合性能的影响。膜/基结合性
3、能最佳的工艺参数范围是碳源浓度为1%，沉积温度 800850,沉积时间 6 h9 h，反应室气压 1.3 kPa2.3 kPa。 关键词：CVD 金刚石，硬质合金，涂层，热应力，结合性能 硬质合金基体上金刚石涂层沉积条件对其结合性能的影响 iiAbstract With the improvement of the deposition technology of CVD diamond, the application of CVD diamond coating in the field of automobile, aviation and aerospace has enormous
4、potential, but the application of CVD diamond coating in industry field still has many problems to be solved, especially improving the adhension of CVD diamond coating and the substrate. The object of this paper is to improve the adhension of CVD diamond and cemented carbide substrate.The research o
5、f the technology of pretreatment of substrate and the deposition technology of CVD diamond coating were carried out.The main job of this paper are presented as follows: 1. The hydrogen pretreatment and two-step pretreatment of cemented carbide substrate were studied, the two-step pretreatment was th
6、e best choise of the pretreatment of cemented carbide substrate. The adhension of CVD diamond and cemented carbide substrate was evaluated by indentation method. The effect of etching depth of substrate on the adhension was studied. The optimal parameters of the pretreatment of substrate were alkali
7、 treated 20 min and acid treated 10 s. 2. The FEA model of thermal stress of diamond coating was established, based on the model, the study was carried out on the effect of deposition parameters on the thermal stress.The result shows the temperature of deposition,cooling speed,the film thickness and
8、 the rake angle of tool have a great influence on the thermal stress. 3. The effect of carbon source concentration, deposition temperature, deposition time and the pressure of reaction chamber on the appearance, quality of CVD diamond and adhension was studied. The optimal parameter range of the dep
9、osition of CVD diamond: carbon source concentration is 1%, deposition temperature is between 800850, deposit time is 6 h9 h, reaction chamber pressure is 1.3 kPa2.3 kPa. Keywords: CVD diamond, cemented carbide, thermal stress, coating, adhesion strength 硬质合金基体上金刚石涂层沉积条件对其结合性能的影响 vi图、表清单 图 1.1 金刚石晶体结
10、构.2 图 1.2 金刚石的各种形态示意图.2 图 2.1 氢气还原预处理硬质合金试样表面形貌 SEM 图.13 图 2.2 氢气还原预处理后的试样外观图.14 图 2.3 氢气还原预处理后试样表面 SEM 图.14 图 2.4 氢气还原预处理 30 分钟和 60 分钟后基体表面能谱图.15 图 2.5 YG6 铣刀片预处理后截面刻蚀深度分析图.18 图 2.6 YG6 铣刀片沉积后截面刻蚀深度分析图.19 图 2.7 硬质合金基体洛氏压痕形貌图.20 图 2.8 压痕法测钢材上涂层结合强度标准.21 图 2.9 压痕实验结果图.22 图 3.1 PLANE13 单元几何结构.28 图 3.2 硬质合金基体金刚石涂层热应力计算模型图.29 图 3.3 有限元模型网格划分图.29 图 3.4 有限元模型计算结果图.31 图 3.5 不同沉积温度的热应力仿真结果云图.32 图 3.6 沉积温度对热应力的影响规律曲线图.32 图 3.7 不同冷却速度的热应力仿真结果云图.33 图 3.8 冷却速度对热应力的影响规律曲线图.33 图 3.9 不同涂层膜厚的热应力仿真结果云图.
