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1、设计巴巴工作室 设计巴巴工作室 Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental design利用曲臂 3 个自由度的相同并列式微型机械结构的实验设计Abstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the
2、wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematic
3、s and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinde
4、r the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulat
5、ion and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance.摘要：曲臂在机械的微小结构设计中已经代替普通机械连接而广泛地使用。然而，错误的曲臂模型会降低机械结构的精密度。在这篇论文中，为了得到正确的曲臂模型而设计了一种平面 3 个自
6、由度相同型式的微型机械结构。为此，一种初步的运动学分析包括逆运动学，内部运动学以及有关工作协调的分析固定模型已经被提出来了。首先，考虑到了 1 个自由度曲臂的循环类型，但是基于 FEM 的模拟结果却与分析的结果不一致。这是因为小轴沿着连杆方向延伸从而阻碍了机械的准确连接。为了解决这个问题，一种包括这种额外的运动机构作为三棱镜连接的 2 个自由度的曲臂模型已经开始部分地使用了。根据这种模型，确保了机械结构的精确性。通过模拟和试验显示了这种准确模型的有效性。这项工作强调了曲臂模型的准确性对保证曲臂在并列微型机械结构中的使用具有重要意义。设计巴巴工作室 、Introduction、介绍Micro-m
7、echanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous s
8、tudies (Moriyama 1, 2, such as Taniguchi, Tomita, etc. 3, 4, such as Ryu, Chang, etc. 5, 6 Peng, etc., etc. 10 - 13 ) is the freedom to use an arm for recycling Crankshaft, three degrees of freedom for Crankshaft spherical arm, and thus the production model. However, sometimes even a small total, wi
9、ll do Crankshaft linear motion. Some researchers believe that there is a Crankshaft additional degree of freedom. However, they ignored the model in the process of easy mobility, but also not to micro-mechanical structure in the correct use of the fixed model. This led to the failure of the implemen
10、tation of micro-systems. Therefore, the focus of this work will be easy mobility is based on the analysis of the accuracy of model Crankshaft.微型机械装置在许多领域是一项关键且必不可少的技术，例如电子显微扫描，X 射线石版印刷术，mask alignment 和微型机械。最近，出现了很多有关利用曲臂的微型机械结构的分析和实验研究。以前的大多数研究（Moriyama 等1,Taniguchi 等2,Tomita 等3,Ryu 等4,Chang 等5,Pen
11、g 等6，等等10-13）是使用 1 个自由度的曲臂作循环臂，3 个自由度的曲臂作球形臂，并以此制作模型。然而，有时就算总量很小，曲臂也会做直线运动。一些研究者认为曲臂有一种额外的自由度。但是，他们忽略了模型程序中的易动性分析，而且也没有提出在微型机械结构中使用正确的固定模型。这就导致了微系统执行的失败。因此，这项工作的焦点将会是基于易动性分析的曲臂模型的准确性。Introduction of the campaign because of the number of independent variables were constrained, and these independent v
12、ariables, in order to find the relevant links between objects must be clearly defined. Above formula can be adopted (1) to describe the type of M, N, L, respectively Fi j and that movement, freedom of space operations, the number of links, as well as linking of the number of mobile 设计巴巴工作室 connectio
13、ns i freedom. Exercise also shows that the minimum functioning of the system. When M N bigger than the sport become redundant system.运动性因独立变量的数目而被限制，而这些独立的变量为了寻找物体之间的相关联系必须明确说明。以上可以通过公式（1）来进行描述，式中M、N、 L、j 和 Fi 分别表示运动性，操作空间自由度，连杆数目，连接物数目以及第 i 个连接物移动的自由度。运动性也表明了系统运转的最小值。当 M 比N 大时，就成为冗余运动系统。Figure 1 sh
14、ows a Crankshaft have freedom of the three micro-mechanical structure. Usually, these systems can be Crankshaft rotary connector of the model. Outlined in Figure 2 of the model Crankshaft. If all Crankshaft have a degree of freedom, then the movement of the system are three degrees of freedom. Howev
15、er, in the past, based on such assumptions are the result of the failure of this model because of the inaccuracy of Crankshaft. On the other hand, if all are Crankshaft model of the rotary connector and prism of connections, then the campaign structure reached 12 degrees of freedom. Even if the limi
16、t of program analysis and theoretical analysis will enable the two degree of freedom model Crankshaft than one degree of freedom model Crankshaft more accurate results, but need 12 to control the operation of three degrees of freedom rather expensive. Therefore, not only the design of Crankshaft to campaign structure to a minimum, but also to ensure that the structure of precision machine
