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1、A high-output-voltage micro-thermoelectric generator having high-aspect-ratio structure具有高深宽比结构的高输出电压的微热电发电机,Contents,1. Introduction 2. Design 3. Fabrication 4. Experimental details 5. Conclusion,1. Introduction,Micro-thermoelectric generators (TEGs) : Advantages Provide continuous real-time feedba
2、ck and monitoring of humans conditions. Long lifetime, low acoustic noise and no moving parts. Challenges The output voltages are currently so low that they cannot operate integrated electronic devices without the assistance of dc-to-dc converters. There is a big energy loss when an up-conversionis
3、carried out from an ultralow voltage of less than 700 mV,which is required for operating bipolar junction transistors.,High-aspect-ratio (HAR) thermocouples: Increase the output voltage Temperature High thermal resistance High integration density Difficulty Thermoelectric materials are difficult to
4、deposit as thick films and to pattern to have an HAR,目的：制造出深宽比为3.5，集成度为620TCs/cm2的热电偶 A TEG chip having 56 thermocouples （TCs）with high thermoelectric properties of 0.16 V K1 cm2 and a thermal resistance of 17.1 K W1, which is suitable for energy harvesting from a low-level heat source such as a hum
5、an body. 方法：Aerosol deposition（ASD）气相淀积，Hot isostatic pressing (HIP)热等静压,2. Design,3. Fabrication,紫外线照射（20mW/cm2,150s） 热处理(2,N2,5001h,590，2h,增强刻蚀) 用稀释的HF(4:1)溶液刻蚀至完全形成,4.对齐，固定，气相淀积（ASD）Bi2Te3 纳米粉(n型) 5.换掩膜版，Bi0.3Sb1.7Te3（p） 6.热等静压（HIP） 电极：Pt/Cu/Pt/Cr,两部分：气相室和淀积室 通过管道连接 气相室：气体引入，振动500Hz(避免凝聚)，加热100 淀
6、积室：喷嘴，粒子束，模具基底固定在平台基底上,4. Experimental details,测试： 铜片用热胶固定 温差（0-30K）用加热器和波尔铁制冷器控制 用56个热电偶植入9mm2区域,结果： 通孔直径50 m,高度350 m，间距150 m 展弦比7，需要每平方厘米4400个通孔，通孔直径30m,The thermoelectric properties that the ASD film achieves are as good as those of the hot-pressed bulk materials because of the assistance of the
7、post annealing process.,在热处理后，底部会有空洞 在热等静压处理后，空洞会减少,填充和掩盖交替进行 直径100，间距240，集成度620 集成度受调整精度影响,4.使用光学调整设备，会使集成度更高，1000-1100,5. Conclusion,We successfully fabricated micro-thermocouples having a HAR of 3.5 and a high integration density of 620 TCs cm2 with high mechanical toughness. Method：Combined a photosensitive glass mold, ASD and HIP. It is expected that the proposed fabrication method will achieve a TEG having an aspect ratio of 7 that will obtain an opencircuit voltage efficiency of 0.38 V cm2 and an output power efficiency of 63.2Wcm2 by energy harvesting from a human body.,THANK YOU,
