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1、 The Microcantilever An Enabling Element for MEMS b Temperature heat sensor c Medium viscosity sensor d Mass sensor e Stress sensor f Magnetic sensor As actuators Schematics showing the microcantilever as sensors 10 3 Impressive impressive microcantilever application examples 11 Detection of single
2、electron M Woodside and P McEuen Science 296 1098 2002 Coulomb oscillations as functions of Vtip a tip positons b and feature changes with Vtip c a b c Detection principle 12 Electron spin detection A major milestone toward the goal of three dimensional molecular images Promising for 3 D view of a s
3、ingle protein The force from an electron spin is only a few attonewtons 10 18N Cantilevers is used for force detection D Rugar R Budakian H J Mamin B W Chui Nature 2004 430 329 IBM Almaden Research Center iOSCAR protocal Plots showing spin position 13 AFM anodic oxidation Array of parallel SiO2 line
4、s AFM anodic oxidation J rg P Kotthaus nanophysics group LMU M nchen R Garc a M Tello Instituto de Microelectr nica de Madrid CSIC Isaac Newton Madrid Spain Applications nanometer scale patterning various devices such as MOSFET side gated FET room temperature single electron transistor a Ti TiOx bar
5、rier 14 Mirkin Group Northwestern University http www chem northwestern edu mkngrp dpn htm Dip Pen nanolithography 15 AFM data storage P Vettiger M Despont U Durig etc IBM Zurich Research Laboratory 120 and 40 nm data bit of PMMA on Si Millipede Writing Reading Thermalmechanical reading writing Poly
6、mer media with indentation bit Millipede cantilever tip array 4096 500GB in2 density 16 AFM manipulation of nanotubes Non contact imaging Plow the nanotube Bend the nanotube Stepwise positioning of a nanotube across an insulating barrier 17 Biological sensing manipulation 1 Florin E L Moy V T Gaub H
7、 E Science 264 415 1994 Forced unbinding of the avidin biotin complex Functionalization of the AFM tip Curves for force measurement Measured forces of different pairs Avidin biotin complex formed 18 Biological sensing manipulation 2 Rief M Gautel M Oesterhelt F Fernandez JM Gaub HE Reversible unfold
8、ing of individual titin immunoglobulin domains by AFM Science 1997 276 1109 1112 Oberhauser AF Marszalek PE Erickson HP Fernandez JM The molecular elasticity of the extracellular matrix protein tenascin Nature 1998 393 181 185 Reversible unfolding of individual titin Measurement principle Sawtooth l
9、ike pattern showing the periodicity and unfolding forces Forces Extension Everything in biology is mechanical 19 Microcantilevers for MEMS 1 For accelerometers Typical structure AD s accelerometer 20 Microcantilevers for MEMS 2 For actuation http mems cwru edu shortcourse Lateral resonant microactua
10、torApplicaple to microfluidics 21 T Mishra Indian Institute of Technology Kanpur India M Carrozza A Eisinberg A Menciassi et al Scuola Superiore Sant Anna MiTech Lab Italy Euglena Kim et al JMEMS 92 A simple design of microgripper Microcantilevers for grippers 1 22 Microcantilevers for grippers 2 23
11、 Microcantilevers for grippers 3 K Saitou and S J Wou Department of Mechanical Engineering and Applied Mechanics University of Michigan Selective resonance and linear microvibromotors Three step Opteration 24 Introduction to MEMS Microsensors 25 微机电系统MEMS 是微电子技术 LIGA和精密机械加工技术 相互融合 并应用现代信息技术构成的微型器件 或
12、系统 它是在微电子技术的基础上发展起来的 但又区别于微电子技术 包括感知外界信息 力 热 光 生物 磁 化学等 的传感器和控制对 象的执行器 以及进行信号处理和控制的电路 1 MEMS Definition 26 A good example Digital Micromirror Device Digital Display Texas Instrument 27 传感MOEMS 指采用微电子和微机械加工技术制造出来的 具有将感受量转换成电信 号的微型器件和系统 主要包括速度 加速度 压力 温度 湿度 气 体 磁 光 声 生物 化学等传感MEMS 微光机电系统的分类 信息MOEMS 把用于通
13、讯 多媒体 网络和智能等领域中的MOEMS技术称为信息 MOEMS 已经形成产业的信息MEMS有硬盘读写头 喷墨打印头 DMD等 目前的研究热点如MEMS光开关和RF MEMS开关等 生物MOEMS 指采用微电子和微机械加工技术制造出来的化学 生物微型分析和检测 芯片或仪器 如微流控芯片 microfluidics 和芯片实验室 Lab 0n chip 28 2 Microsensors Pressure microsensors Microaccelerometers Microgyroscopes Flow microsensors Basic microsensoring structu
14、res Sensor examples 29 a microcantileverb bridgec diaphragm Basic micromechanical structures 30 Statics and Dynamics Fx km x km spring constant d x Fy x dy2 EmIm 31 Sensor examples Pressure microsensors Basic types of Si pressure sensors based on a vertical deflection a piezoresistive polysilicon an
15、d b capacitive single crystal silicon 32 Microaccelerometers Basic types of microaccelerometers a capacitive and b piezoresistive 33 34 Flow Microsensors Principle of a thermal flow sensor a original Thomas flow meter and b boundary layer version 35 课后思考题 1 结合课堂内容和课下的查阅资料 分别说 明扫描隧道显微镜和原子力显微镜的工作 原理 并介绍二者的主要区别 2 什么是MEMS 举一例MEMS传感器 并介绍 它的工作原理和主要应用
