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1、河南大学 硕士学位论文 光纤光栅传感器测量技术的研究 姓名：孟展 申请学位级别：硕士 专业：检测技术与自动化装置 指导教师：张锦龙 2011-05 摘 要 I 摘 要 1970 年低损耗光纤的研制成功极大地改变了传感器的设计方式， 为光纤传感器的研 制提供了物质基础。光纤因其具有灵敏度高、抗电磁干扰、柔韧灵巧、可远程感测、易 埋植、易贴敷、低损耗、耐腐蚀、能够对多点分布式测量等优点而受到人们的重视。在 大型结构健康监测系统和高灵敏度测量中越来越显示出独特优势。近年来，不断涌现的 各种类型的光纤传感器已在多领域得到了广泛的实际应用， 但光纤光栅对温度和应力交 叉敏感，制约其在传感领域中的应用。因
2、此，如何实现光纤光栅多参量同时测量技术， 是目前国内外关注的热点和难点问题之一。 为了解决应变和温度同时测量的问题，本文通过对光纤传感原理的研究，提出了一 种基于光纤布拉格光栅（FBG）特殊封装形式的传感器实现了应变和温度同时测量，并 对其进行了实验研究，为多参量同时测量技术的应用提供了一种崭新的方案。 本文主要研究工作和取得的成果如下： 第一，利用高掺锗光敏光纤以相位掩模法自行研制光纤光栅传感器件，并研究了其 部分传感特性。实验表明，该方法制作光纤光栅工艺简单方便且容易制作出高质量低成 本的 FBG 传感器，并且稳定性要好。通过实验对光栅的温度特性和应变特性进行研究， 验证其基本特性。详细分
3、析光纤 FBG 传感原理及其传感特性，并对 FBG 传感器多参量 同时测量方法进行了分析。 第二，通过实验研究了光栅的温度特性和应变特性，发现光纤光栅同样是很好的传 感器件。通过详细分析光纤 FBG 传感原理及其传感特性，并对 FBG 传感器同时测量理 论进行了分析。分析比较几种常见的光纤光栅双参量测量方法，并加以比较。 第三，提出了应变和温度同时测量传感器方案，设计了一种特殊封装的 FBG 传感 器， 对此测量方案进行计算机模拟， 得到可行性验证。 证实光纤光栅是一种很好的低成、 高精度传感器件。 第四，设计了一套测量系统，该系统是由特殊封装的 FBG 传感器、宽带光源、耦 合器、 频谱仪等
4、部分组成。 该传感器配合测量系统成功实现了温度与应力的双参量测量， 与理论值相符合。证明该结构可以实现温度和应变的区分测量。同时由于选用特殊的封 装，相较于裸光栅实现了对光栅温度灵敏度的增敏。基于传感器温度灵敏度提高为裸光 光纤及光栅传感器测量技术的研究 II 栅的 3 倍以上。增敏后可以实现温度小范围的精确测量，实验中实现了 20到 70范 围的温度测量。 第五，对光纤传感器在瓦斯气体测量方面的研究做了研究，分析对比了几种瓦斯光 纤传感器的原理和优缺点，并提出了一种新型光纤光栅瓦斯传感器的设计方案。 关键词：传感器，光纤光栅，双材料悬臂梁，双参量测量 ABSTRACT III ABSTRAC
5、T 1970 the successful development of the low loss fiber optic sensor has greatly changed the design method of optical fiber sensor research provides material base. Optical fiber due to its high sensitivity, anti-electromagnetism interference, flexibility dexterity, remote sensing, easy preparetions,
6、 easy to stick apply, low loss, corrosion resistance, able to advantages and distributed measurement more attention by people. In large structural health monitoring system and high sensitivity measure in more and more shows the unique advantage. In recent years, emerging various types of fiber optic
7、 sensor has in many areas to be a wide range of practical application, but fiber grating temperature and stress sensitivity to cross in the sensor and restricted the application fields. Therefore, how to realize how parameters simultaneous measurement of fiber grating attention at home and abroad, i
8、s the present technology is one of the hot and difficult problem. In order to solve the strain and temperature measuring simultaneously problems, this article through to the optical fiber sensing principle, the study is proposed based on optical fiber Bragg grating (FBG) special sensor realizes the
9、encapsulation of strain and temperature measuring simultaneously, and analyses the experimental study, which is being parameters simultaneous measurement technology application provides a new scheme. This paper mainly research and achievements are as follows: First, use high doping ge photosensitive
10、 fiber to phase masking method developed by a fiber grating sensors, and studied some of its sensing properties. Experimental results show that this method of producing fiber grating simple process convenient and easy to produce high quality low cost FBG sensor, and better stability. Through the exp
11、eriments of grating temperature properties and strain were investigated, to verify the basic characteristics. Detailed analysis of optical fiber FBG sensing principle and sensing properties, and the FBG sensor many parameters simultaneous measurement methods are analyzed. Second, through the experim
12、ental research of the grating temperature properties and characteristics of fiber grating strain found provided.the sensors are also very good. Through detailed analysis of optical fiber FBG sensing principle and sensing properties, and the FBG sensor measuring simultaneously theory analysis. Analyz
13、ing several common fiber grating measuring method, double parameters and compared. Third, puts forward simultaneously measuring strain and temperature sensor scheme, design a kind of 光纤及光栅传感器测量技术的研究 IV special encapsulates the FBG sensors, computer simulation of this survey scheme, get validated. Co
14、nfirm fiber grating is a kind of very good low into, high-precision sensor pieces. Fourth, designed a set of measuring system, this system is a special package FBG sensors, broadband illuminant, couplers, spectrum analyzer components. The sensor measuring system with the successful implementation of
15、 the temperature and stress double parameters measurement, consistent with the theoretical value. Proof of this structure can realize the divisional measurement temperature and strain. At the same time because choose special packaging, compared with naked grating realize the sensitivity of grating t
16、emperature radiosensitizing. Based on the sensor for naked grating temperature sensitivity improve more than three times. After radiosensitizing may realize the precise measurement of the temperature little scope, experiments realized 70 to 20 range of temperature measurement. Fifth, optical fiber sensors in measuring gas research, analysis and comparison of several gas principles and advantages of optical fiber sensor, and put forward a new kind of optical fiber grating gas sensor de
