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1、 操 作 手 册目录Preface.序言.IIITempress documentation set. 文件设置.IIIUser Definition. 用户定义.IVNotes, Cautions and Warnings.注意，小心，警告.VContents description.VIRevision History.VI1. Introduction.1-11.1 General.1-11.2 Operator area description.1-22. Safety.2-22.1 Emergency Off (EMO).2-22.2 Alarm Signals.2-22.2.1 B
2、uzzer / LED.2-22.2.2 Touchscreen.2-22.2.3 Light tower.2-32.2.4 TSC Alarm menu.2-32.3 Light tower signal description (optional).2-32.4 Toxic Material.2-52.5 Safety measures.2-53. Operator Instructions.2.5-13.1 Load or Unload process wafers.3.1-13.1.1 Load process wafers.3.1-13.1.2 Unload wafers.3.1-1
3、3.2 Selecting a new process recipe.3.2-13.2.1 Touchscreen.3.2-13.2.2 TSC-2.3.2-33.3 Start/Continue a new process recipe.3.3-13.3.1 Touchscreen.3.3-13.3.2 TSC-2.3.3-23.4 Stop a running process recipe.3.4-13.4.1 Touchscreen.3.4-13.4.2 TSC-2.3.4-23.5 Abort a running process recipe.3.5-13.5.1 Touchscree
4、n.3.5-13.5.2 TSC-2.3.5-23.6 Clear Alarms.3.6-13.6.1 Required action.3.6-13.6.2 Touchscreen.3.6-13.6.3 TSC-2.3.6-2Preface序言This set of manuals explains how to operate a Horizontal Diffusion/LPCVD furnace.这套手册是操作水平扩散炉/ LPCVD的说明。Refer to the Touchscreen reference manual (M440.01) or the TSC-2 reference
5、 manual (M450.03) for a full description of all operating screens.触摸屏参考手册(M440.01)和TSC-2参考手册是操作触摸屏的说明。For information about processing refer to the Process Manual (M220.xxx.02).工艺手册(M220.xxx.02)是工艺过程的信息。The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals (M300 ser
6、ies).参考手册(M300 series).是描述Tempress水平扩散炉的。Tempress documentation set 文件设置The complete Tempress documentation set includes: 全部的文件包括 Safety manual 安全手册 Operator manual 操作手册 Reference manuals 参考手册1. Loadstation 装载区2. Furnace 炉子3. Gas cabinet 气柜4. Main Power cabinet 电源柜5. DPC6. DTC7. Touchscreen 触摸屏8. TS
7、C-2 (+ optional SECS/GEM) Vendor documentation 卖主文件Deliverys on request: 按要求交付 Desired vendor documentation Sic and Quartz drawings Sic和石英器件的图纸 RS422 protocol (DPC/DTC)User Definition 用户定义It is strongly recommended that all users first read this manual before starting any procedure. To produce an ac
8、cessible manual suiting on various responsibilities, Tempress defines the following users: 特别建议开始所有程序之前，先看这本手册。为不同职责的人编写一本易懂的操作手册，Tempress定义了以下用户：Operator 操作人员The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a recipe, put the wafers on the b
